Tokyo Electron Limited patent applications published on September 26th, 2024

Patent applications for Tokyo Electron Limited on September 26th, 2024

FILM FORMING APPARATUS (18608057)

Main Inventor

Tatsuya YAMAGUCHI

PATTERN FORMING METHOD AND PLASMA PROCESSING METHOD (18574204)

Main Inventor

Shin OOWADA

SUBSTRATE LIQUID PROCESSING APPARATUS AND SUBSTRATE LIQUID PROCESSING METHOD (18578448)

Main Inventor

Kazuyuki Goto

POSITION DETECTION METHOD AND SUBSTRATE PROCESSING APPARATUS (18606633)

Main Inventor

Hikaru SATO

PLASMA PROCESSING APPARATUS (18612075)

Main Inventor

Masaki HIRAYAMA

Impedance Matching Network and Control Method (18187558)

Main Inventor

John Carroll

ETCHING METHOD AND PLASMA PROCESSING APPARATUS (18611755)

Main Inventor

Yoshinari HATAZAKI

PLASMA PROCESSING APPARATUS (18609340)

Main Inventor

Satoshi TAGA

PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS (18680297)

Main Inventor

Koki MUKAIYAMA

INSULATING FILM FORMING METHOD AND SUBSTRATE PROCESSING SYSTEM (18609278)

Main Inventor

Daisuke OBA

SUBSTRATE LIQUID PROCESSING APPARATUS AND SUBSTRATE LIQUID PROCESSING METHOD (18573615)

Main Inventor

Takanori Obaru

Inner Wall and substrate Processing Apparatus (18733073)

Main Inventor

Yuji ASAKAWA

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS (18579056)

Main Inventor

Yuji OTSUKI