Tokyo Electron Limited patent applications published on September 19th, 2024

Patent applications for Tokyo Electron Limited on September 19th, 2024

SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD (18576898)

Main Inventor

Yosuke HACHIYA

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM (18459913)

Main Inventor

Yoshitomo Sato

SUBSTRATE PROCESSING APPARATUS (18600373)

Main Inventor

Tomoyuki NAGATA

PLATING METHOD AND PLATING APPARATUS (18263435)

Main Inventor

Takeshi Nagao

GATE VALVE AND DRIVING METHOD (18672479)

Main Inventor

Norihiko AMIKURA

SUBSTRATE TRANSFER METHOD AND SUBSTRATE TRANSFER APPARATUS (18599619)

Main Inventor

Kenichirou MATSUYAMA

IGNITION CONTROL METHOD, FILM FORMATION METHOD, AND SUBSTRATE PROCESSING APPARATUS (18602234)

Main Inventor

Takeshi KOBAYASHI

PLASMA PROCESSING WITH BROADBAND RF WAVEFORMS (18671680)

Main Inventor

Jianping Zhao

Plasma Processing Apparatus (18592336)

Main Inventor

Taro HAYAKAWA

ETCHING METHOD, PLASMA PROCESSING APPARATUS, AND SUBSTRATE PROCESSING SYSTEM (18603584)

Main Inventor

Yusuke TAKINO

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND SUBSTRATE MANUFACTURING METHOD (18261507)

Main Inventor

Hayato TANOUE