Tokyo Electron Limited patent applications published on October 10th, 2024
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Contents
- 1 Patent applications for Tokyo Electron Limited on October 10th, 2024
- 1.1 BONDING APPARATUS AND BONDING METHOD (18624279)
- 1.2 FILM FORMING APPARATUS AND FILM FORMING METHOD (18624402)
- 1.3 ESTIMATION MODEL CREATION DEVICE, ESTIMATION MODEL CREATION METHOD, AND STORAGE MEDIUM (18744953)
- 1.4 PLASMA PROCESSING SYSTEMS WITH MATCHING NETWORK AND METHODS (18296944)
- 1.5 Plasma Processing Apparatus (18622596)
- 1.6 SUBSTRATE SUPPORT AND PLASMA PROCESSING APPARATUS (18749678)
- 1.7 Plasma Processing Apparatus and Plasma Control Method (18617334)
- 1.8 SUBSTRATE SUPPORT AND PLASMA PROCESSING APPARATUS (18748263)
- 1.9 SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING SYSTEM, AND MAINTENANCE METHOD (18746251)
- 1.10 METHOD OF PERFORMING MAINTENANCE ON SUBSTRATE PROCESSING APPARATUS, AND THE SUBSTRATE PROCESSING APPARATUS (18750473)
- 1.11 Advanced OES Characterization (18298259)
- 1.12 MULTI LEVEL CONTACT ETCH (18296503)
- 1.13 SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD (18750287)
- 1.14 BONDING METHOD AND BONDING SYSTEM (18625419)
- 1.15 SEMICONDUCTOR DEVICE AND METHOD FOR TRANSISTOR MEMORY ELEMENT (18599495)
Patent applications for Tokyo Electron Limited on October 10th, 2024
BONDING APPARATUS AND BONDING METHOD (18624279)
Main Inventor
Tetsuya Maki
FILM FORMING APPARATUS AND FILM FORMING METHOD (18624402)
Main Inventor
Kensaku NARUSHIMA
ESTIMATION MODEL CREATION DEVICE, ESTIMATION MODEL CREATION METHOD, AND STORAGE MEDIUM (18744953)
Main Inventor
Toyohisa TSURUDA
PLASMA PROCESSING SYSTEMS WITH MATCHING NETWORK AND METHODS (18296944)
Main Inventor
Qiang Wang
Plasma Processing Apparatus (18622596)
Main Inventor
Kazushi KANEKO
SUBSTRATE SUPPORT AND PLASMA PROCESSING APPARATUS (18749678)
Main Inventor
Shin YAMAGUCHI
Plasma Processing Apparatus and Plasma Control Method (18617334)
Main Inventor
Kazushi Kaneko
SUBSTRATE SUPPORT AND PLASMA PROCESSING APPARATUS (18748263)
Main Inventor
Hajime TAMURA
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING SYSTEM, AND MAINTENANCE METHOD (18746251)
Main Inventor
Atsushi SAWACHI
METHOD OF PERFORMING MAINTENANCE ON SUBSTRATE PROCESSING APPARATUS, AND THE SUBSTRATE PROCESSING APPARATUS (18750473)
Main Inventor
Yuya MINOURA
Advanced OES Characterization (18298259)
Main Inventor
Sergey Voronin
MULTI LEVEL CONTACT ETCH (18296503)
Main Inventor
Alec Dorfner
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD (18750287)
Main Inventor
Shota Umezaki
BONDING METHOD AND BONDING SYSTEM (18625419)
Main Inventor
Kazutaka Noda
SEMICONDUCTOR DEVICE AND METHOD FOR TRANSISTOR MEMORY ELEMENT (18599495)
Main Inventor
Mark I. Gardner
