Tokyo Electron Limited patent applications published on July 25th, 2024

Summary of the patent applications from Tokyo Electron Limited on July 25th, 2024

1. **Summary**: Tokyo Electron Limited has recently filed patents for innovative substrate processing methods, wafer handling apparatus, semiconductor device structures, and substrate transfer devices. These patents introduce advanced techniques for precise substrate manipulation, efficient wafer bonding, complex transistor designs, and streamlined substrate transfer in semiconductor manufacturing processes.

2. **Key Points of Patents**:

  * The substrate processing method involves specific absorption layers for laser light manipulation.
  * The wafer handling apparatus ensures precise alignment and bonding during semiconductor manufacturing.
  * The semiconductor device features a complex channel structure transistor with enhanced performance.
  * The substrate transfer device includes a lift mechanism for efficient substrate transfer between processing modules.

3. **Notable Applications**:

  * These patents can revolutionize the manufacturing of electronic devices, solar panels, and microelectronics.
  * They offer improved accuracy, efficiency, and control in semiconductor fabrication processes.
  * The technology can lead to cost savings, increased productivity, and higher-quality semiconductor products.

Patent applications for Tokyo Electron Limited on July 25th, 2024

TEMPERATURE CONTROL METHOD OF VAPORIZER AND SUBSTRATE PROCESSING APPARATUS (18417507)

Main Inventor

Junichi HARADA

SUBSTRATE TREATMENT METHOD AND SUBSTRATE TREATMENT APPARATUS (18416087)

Main Inventor

Takeshi SHIMOAOKI

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD (18412739)

Main Inventor

Yoji SAKATA

UPPER ELECTRODE STRUCTURE AND PLASMA PROCESSING APPARATUS (18628269)

Main Inventor

Tetsuji SATO

IN-SITU FOCUS RING COATING (18156917)

Main Inventor

Minjoon Park

PLASMA PROCESSING APPARATUS (18628349)

Main Inventor

Ryota SAKANE

Plasma Etching with Metal Sputtering (18156900)

Main Inventor

Minjoon Park

HEAT TREATMENT DEVICE AND TREATMENT METHOD (18626475)

Main Inventor

Yohei SANO

SUBSTRATE TREATMENT METHOD, SUBSTRATE TREATMENT APPARATUS, AND COMPUTER STORAGE MEDIUM (18418757)

Main Inventor

Kosuke YOSHIHARA

SUBSTRATE PROCESSING APPARATUS (18566183)

Main Inventor

Yohei NAKAGOMI

SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD (18417564)

Main Inventor

Shinsuke TAKAKI

SUBSTRATE TRANSFER MECHANISM AND SUBSTRATE TRANSFERRING METHOD (18626565)

Main Inventor

Kousei IDE

DEVICE AND METHOD OF FORMING 3D U-SHAPED NANOSHEET CFET (18159462)

Main Inventor

H. Jim FULFORD

COMPLIANT CHUCK EDGE RING (18530067)

Main Inventor

Christopher NETZBAND

SUBSTRATE PROCESSING METHOD (18562502)

Main Inventor

Yoshihisa MATSUBARA