Tokyo Electron Limited patent applications published on December 19th, 2024
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Contents
- 1 Patent applications for Tokyo Electron Limited on December 19th, 2024
- 1.1 PROCESSING METHOD AND PROCESSING SYSTEM (18706115)
- 1.2 OPTICAL SENSOR FOR FILM THICKNESS MEASUREMENT (18501672)
- 1.3 FORMATION OF SUB-LITHOGRAPHIC MANDREL PATTERNS USING REVERSIBLE OVERCOAT (18615313)
- 1.4 APPARATUS AND METHODS FOR BEAM PROCESSING OF SUBSTRATES (18814175)
- 1.5 HYBRID MODELING FOR FILM METROLOGY (18535103)
- 1.6 PROFILE DETECTING METHOD AND PROFILE DETECTING APPARATUS (18820492)
- 1.7 PLASMA PROCESSING APPARATUS (18741841)
- 1.8 METHOD OF DEPOSITION IN HIGH ASPECT RATIO (HAR) FEATURES (18337281)
- 1.9 LIQUID CIRCULATION SYSTEM, SUBSTRATE PROCESSING APPARATUS, AND LIQUID CIRCULATION METHOD (18703525)
- 1.10 SYSTEMS AND METHODS FOR DETERMINING A LOCALIZED FLUID VELOCITY ON A SPINNING SUBSTRATE BY TRACKING MOVEMENT OF A TRACER ACROSS THE SPINNING SUBSTRATE (18210762)
- 1.11 SYSTEMS AND METHODS FOR DETERMINING A LOCALIZED FLUID VELOCITY OF A PROCESSING LIQUID DISPENSED ON A SPINNING SUBSTRATE BY TRACKING MOVEMENT OF AN INDUCED PERTURBATION IN THE PROCESSING LIQUID ACROSS THE SPINNING SUBSTRATE ([[Tokyo Electron Limited (18210772). SYSTEMS AND METHODS FOR DETERMINING A LOCALIZED FLUID VELOCITY OF A PROCESSING LIQUID DISPENSED ON A SPINNING SUBSTRATE BY TRACKING MOVEMENT OF AN INDUCED PERTURBATION IN THE PROCESSING LIQUID ACROSS THE SPINNING SUBSTRATE|18210772]])
- 1.12 SYSTEMS AND METHODS FOR DETERMINING A FLUID HEIGHT AND/OR A FLUID VELOCITY ON A SPINNING SUBSTRATE (18210773)
Patent applications for Tokyo Electron Limited on December 19th, 2024
PROCESSING METHOD AND PROCESSING SYSTEM (18706115)
Main Inventor
Kazuya HISANO
OPTICAL SENSOR FOR FILM THICKNESS MEASUREMENT (18501672)
Main Inventor
Ivan MALEEV
FORMATION OF SUB-LITHOGRAPHIC MANDREL PATTERNS USING REVERSIBLE OVERCOAT (18615313)
Main Inventor
Michael Murphy
APPARATUS AND METHODS FOR BEAM PROCESSING OF SUBSTRATES (18814175)
Main Inventor
Mirko Vukovic
HYBRID MODELING FOR FILM METROLOGY (18535103)
Main Inventor
Yan CHEN
PROFILE DETECTING METHOD AND PROFILE DETECTING APPARATUS (18820492)
Main Inventor
Toshihiro KITAO
PLASMA PROCESSING APPARATUS (18741841)
Main Inventor
Manabu ISHIKAWA
METHOD OF DEPOSITION IN HIGH ASPECT RATIO (HAR) FEATURES (18337281)
Main Inventor
Shihsheng Chang
LIQUID CIRCULATION SYSTEM, SUBSTRATE PROCESSING APPARATUS, AND LIQUID CIRCULATION METHOD (18703525)
Main Inventor
Takao OKABE
SYSTEMS AND METHODS FOR DETERMINING A LOCALIZED FLUID VELOCITY ON A SPINNING SUBSTRATE BY TRACKING MOVEMENT OF A TRACER ACROSS THE SPINNING SUBSTRATE (18210762)
Main Inventor
Michael Carcasi
SYSTEMS AND METHODS FOR DETERMINING A LOCALIZED FLUID VELOCITY OF A PROCESSING LIQUID DISPENSED ON A SPINNING SUBSTRATE BY TRACKING MOVEMENT OF AN INDUCED PERTURBATION IN THE PROCESSING LIQUID ACROSS THE SPINNING SUBSTRATE ([[Tokyo Electron Limited (18210772). SYSTEMS AND METHODS FOR DETERMINING A LOCALIZED FLUID VELOCITY OF A PROCESSING LIQUID DISPENSED ON A SPINNING SUBSTRATE BY TRACKING MOVEMENT OF AN INDUCED PERTURBATION IN THE PROCESSING LIQUID ACROSS THE SPINNING SUBSTRATE|18210772]])
Main Inventor
Michael Carcasi
SYSTEMS AND METHODS FOR DETERMINING A FLUID HEIGHT AND/OR A FLUID VELOCITY ON A SPINNING SUBSTRATE (18210773)
Main Inventor
Michael Carcasi
