Taiwan semiconductor manufacturing co., ltd. (20240327985). GAS TUBE, GAS SUPPLY SYSTEM AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE USING THE SAME simplified abstract
Contents
GAS TUBE, GAS SUPPLY SYSTEM AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE USING THE SAME
Organization Name
taiwan semiconductor manufacturing co., ltd.
Inventor(s)
Yi-Shiung Chen of Taoyuan City (TW)
Cheng-Yi Huang of Hsinchu City (TW)
Chih-Shen Yang of Yunlin County (TW)
Shou-Wen Kuo of Hsinchu City (TW)
Po-Wen Chai of Tainan City (TW)
GAS TUBE, GAS SUPPLY SYSTEM AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE USING THE SAME - A simplified explanation of the abstract
This abstract first appeared for US patent application 20240327985 titled 'GAS TUBE, GAS SUPPLY SYSTEM AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE USING THE SAME
The abstract describes a gas tube with a porous material body and a resistant sheath, along with a gas supply system and a semiconductor manufacturing method utilizing this gas tube.
- The gas tube consists of a porous material body with a hollow tube structure and an empty cavity inside, along with a resistant sheath surrounding it.
- The porous material body is hydrophobic and contains numerous pores for gas flow.
- The resistant sheath has multiple holes for gas passage through it.
Potential Applications: - This technology can be used in semiconductor manufacturing processes. - It can also be applied in gas supply systems for various industrial purposes.
Problems Solved: - Provides a reliable and efficient gas tube for semiconductor manufacturing. - Ensures proper gas flow and containment within the tube.
Benefits: - Enhanced gas supply system performance. - Improved semiconductor manufacturing processes.
Commercial Applications: - This technology can be valuable in the semiconductor industry for gas handling. - It can also find applications in other industries requiring precise gas supply systems.
Questions about the gas tube technology: 1. How does the hydrophobic nature of the porous material body impact its performance? 2. What are the specific advantages of using a resistant sheath with multiple holes in the gas tube design?
Original Abstract Submitted
a gas tube, a gas supply system containing the same and a semiconductor manufacturing method using the same are provided. the gas tube includes a porous material body and a resistant sheath surrounding the porous material body. the porous material body has a hollow tube structure and an empty cavity inside the hollow tube structure. the porous material body is hydrophobic and has a plurality of pores therein. the resistant sheath is disposed on the porous material body and surrounds the porous material body. the resistant sheath includes a plurality of holes penetrating through the resistant sheath.
