Taiwan semiconductor manufacturing co., ltd. (20240186162). APPARATUS AND METHOD FOR INSPECTING WAFER CARRIERS simplified abstract
Contents
- 1 APPARATUS AND METHOD FOR INSPECTING WAFER CARRIERS
- 1.1 Organization Name
- 1.2 Inventor(s)
- 1.3 APPARATUS AND METHOD FOR INSPECTING WAFER CARRIERS - A simplified explanation of the abstract
- 1.4 Simplified Explanation
- 1.5 Potential Applications
- 1.6 Problems Solved
- 1.7 Benefits
- 1.8 Potential Commercial Applications
- 1.9 Possible Prior Art
- 1.10 Original Abstract Submitted
APPARATUS AND METHOD FOR INSPECTING WAFER CARRIERS
Organization Name
taiwan semiconductor manufacturing co., ltd.
Inventor(s)
Cheng-Kang Hu of Kaohsiung City (TW)
Shou-Wen Kuo of Hsinchu City (TW)
Sheng-Hsiang Chuang of Hsin-Chu (TW)
Jiun-Rong Pai of Jhubei City (TW)
Hsu-Shui Liu of Pingjhen City (TW)
APPARATUS AND METHOD FOR INSPECTING WAFER CARRIERS - A simplified explanation of the abstract
This abstract first appeared for US patent application 20240186162 titled 'APPARATUS AND METHOD FOR INSPECTING WAFER CARRIERS
Simplified Explanation
The patent application describes an apparatus for inspecting wafer carriers, which includes a housing, a load port, a robot arm, and a processor. The load port loads a wafer carrier into the housing, the robot arm moves a camera to capture images of the wafer carrier, and the processor processes the images to inspect the wafer carrier.
- Housing
- Load port for loading wafer carrier
- Robot arm with camera for capturing images
- Processor for processing images
Potential Applications
The technology can be used in semiconductor manufacturing facilities to inspect wafer carriers for defects before loading wafers onto them.
Problems Solved
This technology helps in detecting any defects or issues with the wafer carriers, ensuring that the wafers are not damaged during the manufacturing process.
Benefits
The apparatus allows for efficient and accurate inspection of wafer carriers, reducing the risk of damage to wafers and improving overall production quality.
Potential Commercial Applications
One potential commercial application of this technology is in semiconductor manufacturing plants where the inspection of wafer carriers is crucial for maintaining high-quality production standards.
Possible Prior Art
There may be similar systems used in semiconductor manufacturing facilities for inspecting wafer carriers, but the specific combination of features described in this patent application may be novel.
What are the specific features of the robot arm in this apparatus?
The robot arm in this apparatus is configured to move a first camera connected to it, allowing for the capture of multiple images of the wafer carrier from different angles.
How does the processor process the images captured by the camera?
The processor analyzes the images to inspect the wafer carrier for any defects or abnormalities, ensuring that it meets the required quality standards for semiconductor manufacturing.
Original Abstract Submitted
an apparatus for inspecting wafer carriers is disclosed. in one example, the apparatus includes: a housing; a load port; a robot arm inside the housing; and a processor. the load port is configured to load a wafer carrier into the housing. the robot arm is configured to move a first camera connected to the robot arm. the first camera is configured to capture a plurality of images of the wafer carrier. the processor is configured to process the plurality of images to inspect the wafer carrier.
