Seiko epson corporation (20240113692). METHOD FOR MANUFACTURING VIBRATOR simplified abstract
Contents
- 1 METHOD FOR MANUFACTURING VIBRATOR
METHOD FOR MANUFACTURING VIBRATOR
Organization Name
Inventor(s)
Tsukasa Watanabe of Minamiminowa-mura (JP)
Keiichi Yamaguchi of Ina-shi (JP)
Shigeru Shiraishi of Ina-shi (JP)
Ryuta Nishizawa of Nagano-shi (JP)
METHOD FOR MANUFACTURING VIBRATOR - A simplified explanation of the abstract
This abstract first appeared for US patent application 20240113692 titled 'METHOD FOR MANUFACTURING VIBRATOR
Simplified Explanation
The abstract describes a method for manufacturing a vibrator using a quartz crystal substrate with protective films and dry etching steps.
- Preparation step: Prepare a quartz crystal substrate with a front and back surface.
- First protective film formation step: Form a protective film in the element formation region.
- First dry etching step: Dry etch the substrate through the first protective film.
- Second protective film formation step: Form a protective film in the first groove formation region.
- Second dry etching step: Dry etch the substrate through the first and second protective films.
Potential Applications
The technology can be applied in the manufacturing of vibrators for various electronic devices such as smartphones, tablets, and wearable technology.
Problems Solved
This method solves the problem of ensuring precise and accurate manufacturing of vibrators on quartz crystal substrates.
Benefits
The benefits of this technology include improved performance and reliability of vibrators in electronic devices, as well as cost-effective manufacturing processes.
Potential Commercial Applications
The technology can be commercially applied in the production of electronic devices requiring vibrators, contributing to the advancement of the consumer electronics industry.
Possible Prior Art
One possible prior art could be the use of protective films and dry etching techniques in the manufacturing of electronic components on substrates, although specific to vibrators on quartz crystal substrates may not be readily available.
Unanswered Questions
How does this method compare to traditional vibrator manufacturing processes?
This article does not provide a direct comparison between this method and traditional manufacturing processes for vibrators. It would be helpful to understand the specific advantages and disadvantages of this new method in comparison to existing techniques.
What are the potential limitations or challenges of implementing this manufacturing method on a large scale?
The article does not address the scalability or potential challenges of implementing this manufacturing method on a large scale. It would be important to consider factors such as production efficiency, cost-effectiveness, and quality control when applying this method in mass production settings.
Original Abstract Submitted
a method for manufacturing a vibrator includes a preparation step of preparing a quartz crystal substrate having a first surface and a second surface which are in a front and back relationship, a first protective film formation step of forming a first protective film in a region of an element formation region other than a first groove formation region and a second groove formation region when a region of the quartz crystal substrate where the vibrator is formed is referred to as the element formation region, a region where the first groove is formed is referred to as the first groove formation region, and a region where the second groove is formed is referred to as the second groove formation region, a first dry etching step of dry etching the quartz crystal substrate from the first surface through the first protective film, a second protective film formation step of forming a second protective film in the first groove formation region, and a second dry etching step of dry etching the quartz crystal substrate from the first surface through the first protective film and the second protective film.
