Seiko epson corporation (20240113691). METHOD FOR MANUFACTURING VIBRATOR simplified abstract
Contents
- 1 METHOD FOR MANUFACTURING VIBRATOR
- 1.1 Organization Name
- 1.2 Inventor(s)
- 1.3 METHOD FOR MANUFACTURING VIBRATOR - A simplified explanation of the abstract
- 1.4 Simplified Explanation
- 1.5 Potential Applications
- 1.6 Problems Solved
- 1.7 Benefits
- 1.8 Potential Commercial Applications
- 1.9 Possible Prior Art
- 1.10 Unanswered Questions
- 1.11 Original Abstract Submitted
METHOD FOR MANUFACTURING VIBRATOR
Organization Name
Inventor(s)
Tsukasa Watanabe of Minamiminowa-mura (JP)
Keiichi Yamaguchi of Ina-shi (JP)
Shigeru Shiraishi of Ina-shi (JP)
Ryuta Nishizawa of Nagano-shi (JP)
METHOD FOR MANUFACTURING VIBRATOR - A simplified explanation of the abstract
This abstract first appeared for US patent application 20240113691 titled 'METHOD FOR MANUFACTURING VIBRATOR
Simplified Explanation
The method described in the patent application involves the manufacturing of a vibrator using a quartz crystal substrate with protective films and dry etching steps.
- Quartz crystal substrate preparation step
- First protective film formation step in the second groove formation region
- Second protective film formation step in the first groove formation region
- Third protective film formation step in the element formation region
- First dry etching step of the quartz crystal substrate
Potential Applications
The technology described in this patent application could be applied in the manufacturing of electronic devices such as sensors, oscillators, and filters.
Problems Solved
This technology solves the problem of protecting delicate components during the manufacturing process, ensuring the integrity and functionality of the final product.
Benefits
The benefits of this technology include improved reliability and performance of electronic devices, as well as increased efficiency in the manufacturing process.
Potential Commercial Applications
The potential commercial applications of this technology include the production of high-quality electronic components for industries such as telecommunications, automotive, and consumer electronics.
Possible Prior Art
One possible prior art for this technology could be the use of protective films in the manufacturing of electronic components to prevent damage during processing.
Unanswered Questions
How does this technology compare to existing methods for manufacturing vibrators?
This article does not provide a direct comparison to existing methods, leaving the reader to wonder about the advantages and disadvantages of this new approach.
What are the specific characteristics of the protective films used in this method?
The article does not delve into the specific properties or materials of the protective films, leaving a gap in understanding for readers interested in the technical details.
Original Abstract Submitted
a method for manufacturing a vibrator includes a preparation step of preparing a quartz crystal substrate having a first surface and a second surface which are in a front and back relationship, a first protective film formation step of forming a first protective film in a second groove formation region when a region of the quartz crystal substrate where the vibrator is formed is referred to as an element formation region, a region where the first groove is formed is referred to as a first groove formation region, and a region where the second groove is formed is referred to as the second groove formation region, a second protective film formation step of forming, in the first groove formation region, a second protective film having a lower etching rate than the first protective film, a third protective film formation step of forming a third protective film in a region of the element formation region other than the first groove formation region and the second groove formation region, and a first dry etching step of dry etching the quartz crystal substrate from the first surface through the first protective film, the second protective film, and the third protective film.
