Seiko epson corporation (20240113690). METHOD FOR MANUFACTURING VIBRATOR simplified abstract
Contents
- 1 METHOD FOR MANUFACTURING VIBRATOR
- 1.1 Organization Name
- 1.2 Inventor(s)
- 1.3 METHOD FOR MANUFACTURING VIBRATOR - A simplified explanation of the abstract
- 1.4 Simplified Explanation
- 1.5 Potential Applications
- 1.6 Problems Solved
- 1.7 Benefits
- 1.8 Potential Commercial Applications
- 1.9 Possible Prior Art
- 1.10 Unanswered Questions
- 1.11 Original Abstract Submitted
METHOD FOR MANUFACTURING VIBRATOR
Organization Name
Inventor(s)
Tsukasa Watanabe of Minamiminowa-mura (JP)
Keiichi Yamaguchi of Ina-shi (JP)
Shigeru Shiraishi of Ina-shi (JP)
Ryuta Nishizawa of Nagano-shi (JP)
METHOD FOR MANUFACTURING VIBRATOR - A simplified explanation of the abstract
This abstract first appeared for US patent application 20240113690 titled 'METHOD FOR MANUFACTURING VIBRATOR
Simplified Explanation
The method for manufacturing a vibrator involves preparing a quartz crystal substrate with two surfaces, stacking films on the first surface, patterning the stacked body, and dry etching the substrate through the stacked body.
- Quartz crystal substrate preparation:
- Quartz crystal substrate with front and back surfaces
- Film stacking and patterning:
- Sequential stacking of underlying films and protective film on the first surface - Patterning the stacked body while keeping films in specific regions
- Dry etching:
- Etching the substrate through the stacked body from the first surface
Potential Applications
The technology can be applied in the manufacturing of vibrators for various devices such as sensors, actuators, and communication devices.
Problems Solved
1. Precise fabrication of vibrators with specific patterns. 2. Efficient manufacturing process for quartz crystal-based vibrators.
Benefits
1. Improved performance and reliability of vibrators. 2. Cost-effective production of vibrators with intricate designs.
Potential Commercial Applications
Optimizing Quartz Crystal Vibrator Manufacturing Process for Enhanced Device Performance
Possible Prior Art
Prior art may include methods for fabricating vibrators using different materials or processes, such as piezoelectric ceramics or MEMS technology.
Unanswered Questions
How does the patterning process affect the overall performance of the vibrator?
The patterning of the stacked body plays a crucial role in defining the functionality and efficiency of the vibrator. Further research and testing are needed to understand the impact of different patterning techniques on the device's performance.
What are the potential challenges in scaling up this manufacturing method for mass production?
While the current method shows promise for small-scale production, scaling up for mass production may pose challenges in terms of consistency, yield rates, and cost-effectiveness. Research and development efforts are required to address these challenges and optimize the process for large-scale manufacturing.
Original Abstract Submitted
a method for manufacturing a vibrator includes a preparation step of preparing a quartz crystal substrate having a first surface and a second surface which are in a front and back relationship, a first film formation step of forming a first stacked body by sequentially stacking a first underlying film, a second underlying film, and a first protective film at the first surface, a first patterning step of patterning the first stacked body in a manner in which the first underlying film, the second underlying film, and the first protective film remain in a region of an element formation region other than a first groove formation region and a second groove formation region, the first underlying film and the second underlying film remain in the first groove formation region, and the first underlying film remains in the second groove formation region, and a first dry etching step of dry etching the quartz crystal substrate from the first surface through the first stacked body.
