Seiko epson corporation (20240110786). METHOD FOR MANUFACTURING VIBRATOR simplified abstract
Contents
METHOD FOR MANUFACTURING VIBRATOR
Organization Name
Inventor(s)
Hiyori Sakata of Shinagawa-ku (JP)
Keiichi Yamaguchi of Ina-shi (JP)
Ryuta Nishizawa of Nagano-shi (JP)
Shigeru Shiraishi of Ina-shi (JP)
METHOD FOR MANUFACTURING VIBRATOR - A simplified explanation of the abstract
This abstract first appeared for US patent application 20240110786 titled 'METHOD FOR MANUFACTURING VIBRATOR
Simplified Explanation
The abstract describes a method for manufacturing a vibrator using a quartz crystal substrate with protective films and dry etching.
- Explanation:
* Preparation step: Prepare quartz crystal substrate with front and back surfaces. * Protective film formation step: Form protective film with openings over specific regions. * Dry etching step: Etch substrate through protective film.
- Potential Applications:
* Manufacturing of vibrators for electronic devices. * Production of precise and high-quality quartz crystal components.
- Problems Solved:
* Ensures accurate and controlled etching of quartz crystal substrate. * Protects sensitive regions of the substrate during manufacturing process.
- Benefits:
* Improved efficiency in vibrator production. * Enhanced durability and performance of quartz crystal components.
- Potential Commercial Applications:
* Consumer electronics industry for smartphones, tablets, and wearables. * Industrial applications for sensors, oscillators, and timing devices.
- Possible Prior Art:
* Prior methods of etching quartz crystal substrates for vibrator production. * Existing protective film technologies used in semiconductor manufacturing.
Questions:
1. How does the method of dry etching the quartz crystal substrate improve the manufacturing process compared to traditional methods?
Answer: The dry etching process allows for precise and controlled removal of material from the substrate, resulting in more accurate and consistent vibrator production.
2. What specific characteristics of the protective film are crucial for ensuring the success of the manufacturing process?
Answer: The protective film must have openings that overlap with specific regions of the substrate to protect them during etching, ensuring the integrity of the vibrator components.
Original Abstract Submitted
a method for manufacturing a vibrator includes a preparation step of preparing a quartz crystal substrate having a first surface and a second surface that are in a front and back relationship, a first protective film formation step of forming a first protective film in an element formation region of the first surface, the first protective film having a first opening overlapping a first groove formation region and a second opening overlapping a second groove formation region, in which a region of the quartz crystal substrate where the vibrator is formed is referred to as the element formation region, a region where the first groove is formed is referred to as the first groove formation region, and a region where the second groove is formed is referred to as the second groove formation region, and a first dry etching step of dry etching the quartz crystal substrate from the first surface through the first protective film. wa<wb, in which wa represents a width of the first opening and wb represents a width of the second opening.
