Samsung electronics co., ltd. (20250096135). THREE-DIMENSIONAL SEMICONDUCTOR DEVICE
Contents
THREE-DIMENSIONAL SEMICONDUCTOR DEVICE
Organization Name
Inventor(s)
Chang-Sup Lee of Hwaseong-si KR
THREE-DIMENSIONAL SEMICONDUCTOR DEVICE
This abstract first appeared for US patent application 20250096135 titled 'THREE-DIMENSIONAL SEMICONDUCTOR DEVICE
Original Abstract Submitted
a three-dimensional (3d) semiconductor device includes a stack structure including first and second stacks stacked on a substrate. each of the first and second stacks includes a first electrode and a second electrode on the first electrode. a sidewall of the second electrode of the first stack is horizontally spaced apart from a sidewall of the second electrode of the second stack by a first distance. a sidewall of the first electrode is horizontally spaced apart from the sidewall of the second electrode by a second distance in each of the first and second stacks. the second distance is smaller than a half of the first distance.
