Samsung electronics co., ltd. (20250006654). SEMICONDUCTOR DEVICE HAVING TEST PATTERN
Jump to navigation
Jump to search
SEMICONDUCTOR DEVICE HAVING TEST PATTERN
Organization Name
Inventor(s)
SEMICONDUCTOR DEVICE HAVING TEST PATTERN
This abstract first appeared for US patent application 20250006654 titled 'SEMICONDUCTOR DEVICE HAVING TEST PATTERN
Original Abstract Submitted
a semiconductor device includes a semiconductor substrate, a first test pattern disposed on the semiconductor substrate, and a second test pattern located adjacent to the first test pattern. the first test pattern includes an overlay pattern, and the second test pattern includes a test element group.