Samsung electronics co., ltd. (20240416529). ROBOT BLADE
ROBOT BLADE
Organization Name
Inventor(s)
Kyunghoon Joo of Suwon-si (KR)
ROBOT BLADE
This abstract first appeared for US patent application 20240416529 titled 'ROBOT BLADE
Original Abstract Submitted
a robot blade may include a blade body and a frequency variator. the blade body may include a frequency variation groove. the frequency variator may be detachably arranged in the frequency variation groove to vary a frequency of the blade body. thus, the robot blade may have a changed shape by removing at least one frequency variation block included in the frequency variator. therefore, the robot blade having the changed shape may have a frequency different from a frequency of a part in semiconductor fabrication equipment to prevent a resonance. as a result, a vibration of the robot blade may be suppressed to prevent damage to a semiconductor substrate.