Samsung electronics co., ltd. (20240412350). OPTICAL METROLOGY DEVICE

OPTICAL METROLOGY DEVICE

Organization Name

samsung electronics co., ltd.

Inventor(s)

Minsu Jo of Suwon-si (KR)

Hankyoul Moon of Suwon-si (KR)

Gawoon Bang of Suwon-si (KR)

Woohyeon So of Suwon-si (KR)

Jongsun An of Suwon-si (KR)

Jooyoun Kang of Suwon-si (KR)

Kwangsoo Kim of Suwon-si (KR)

Karam Lee of Suwon-si (KR)

Kwangsung Lee of Suwon-si (KR)

Sewon Jeon of Suwon-si (KR)

OPTICAL METROLOGY DEVICE

This abstract first appeared for US patent application 20240412350 titled 'OPTICAL METROLOGY DEVICE

Original Abstract Submitted

an optical metrology device includes a lighting unit configured to simultaneously illuminate first illumination light at a first angle of incidence having a difference more than a critical angle from a measurement angle, and second illumination light having a wavelength, different from a wavelength of the first illumination light, at a second angle of incidence having a difference of equal to or less than the critical angle from the measurement angle, onto a surface of a substrate; an optical system configured to collect reflected light from the surface of the substrate according to the first illumination light and the second illumination light; and a multichannel camera configured to generate an original image in which a dark field image and a bright field image of the surface of the substrate are integrated, based on the reflected light collected by the optical system.