Samsung electronics co., ltd. (20240405113). SEMICONDUCTOR DEVICE

SEMICONDUCTOR DEVICE

Organization Name

samsung electronics co., ltd.

Inventor(s)

Yang Xu of Suwon-si (KR)

Gyeom Kim of Suwon-si (KR)

Young Kwang Kim of Suwon-si (KR)

Jin Bum Kim of Suwon-si (KR)

Yoon Tae Nam of Suwon-si (KR)

Kyung Bin Chun of Suwon-si (KR)

Ryong Ha of Suwon-si (KR)

Yoon Heo of Suwon-si (KR)

SEMICONDUCTOR DEVICE

This abstract first appeared for US patent application 20240405113 titled 'SEMICONDUCTOR DEVICE

Original Abstract Submitted

a semiconductor device includes a substrate. an active pattern extends in a first horizontal direction on the substrate. first to third nanosheets are sequentially spaced apart from each other in a vertical direction on the active pattern. a gate electrode extends in a second horizontal direction on the active pattern and surrounds the first to third nanosheets. a source/drain region includes a first layer disposed along side walls and a bottom surface of a source/drain trench and a second layer filling the source/drain trench. the second layer includes a first lower side wall facing a side wall of the first nanosheet and an opposite second lower side wall. a lower surface connects the first and second lower side walls and extends in the first horizontal direction. the first and second lower side walls of the second layer extend to have a constant slope in opposite directions to each other.