Samsung electronics co., ltd. (20240347370). CARRIER DECHUCKING SYSTEM AND CARRIER DECHUCKING METHOD USING CARRIER DECHUCKING SYSTEM simplified abstract
Contents
CARRIER DECHUCKING SYSTEM AND CARRIER DECHUCKING METHOD USING CARRIER DECHUCKING SYSTEM
Organization Name
Inventor(s)
Kyoungran Kim of Suwon-si (KR)
Kwanghyeon Jeong of Suwon-si (KR)
Seongbeom Lee of Suwon-si (KR)
CARRIER DECHUCKING SYSTEM AND CARRIER DECHUCKING METHOD USING CARRIER DECHUCKING SYSTEM - A simplified explanation of the abstract
This abstract first appeared for US patent application 20240347370 titled 'CARRIER DECHUCKING SYSTEM AND CARRIER DECHUCKING METHOD USING CARRIER DECHUCKING SYSTEM
Simplified Explanation:
The patent application describes a carrier dechucking system that includes a work carrier with a substrate, support film, and ring frame. The system utilizes a placement table with lifting pins and an ionizer to control the movement of the work carrier and remove static electricity.
- The work carrier consists of a substrate, support film, and ring frame.
- The placement table has lifting pins and an ionizer to control movement and remove static electricity.
- The system effectively dechucks the work carrier by controlling the surface voltages.
Key Features and Innovation:
- Work carrier with substrate, support film, and ring frame.
- Placement table with lifting pins and ionizer.
- Control of surface voltages for effective dechucking.
Potential Applications:
The technology can be applied in semiconductor manufacturing, electronics assembly, and other industries requiring precise handling of delicate materials.
Problems Solved:
The system addresses issues related to static electricity buildup, precise handling of work carriers, and efficient dechucking processes.
Benefits:
- Improved handling of delicate materials.
- Enhanced efficiency in manufacturing processes.
- Reduction of static electricity-related issues.
Commercial Applications:
The technology can be used in semiconductor fabrication facilities, electronics manufacturing plants, and other industries requiring precise material handling.
Prior Art:
Researchers can explore prior art related to carrier dechucking systems in semiconductor manufacturing, ionizer technology, and static electricity control methods.
Frequently Updated Research:
Stay informed about advancements in ionizer technology, material handling systems, and static electricity control methods relevant to carrier dechucking systems.
Questions about Carrier Dechucking Systems:
1. What are the key components of a carrier dechucking system? 2. How does the ionizer in the system help in removing static electricity?
Original Abstract Submitted
a carrier dechucking system includes a work carrier including a substrate having a first surface, an opposite second surface with a support film attached, and a ring frame surrounding the substrate. the work carrier is placed on a placement table having a support surface on which a lower surface of the support film is maintained, lifting pins configured to move the work carrier, an ionizer configured to eject ions to the lower surface, and a controller. the controller is configured to control the lifting pins to move the work carrier from the support surface to first and second levels, and to control the ionizer to remove static electricity charged on the support film from the support surface to the first level. at the first level, a surface voltage of the first surface of the substrate is lower than a surface voltage of the lower surface of the support film.
