Samsung electronics co., ltd. (20240341465). BRUSH CLEANING DEVICE AND CHEMICAL MECHANICAL POLISHING APPARATUS simplified abstract

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BRUSH CLEANING DEVICE AND CHEMICAL MECHANICAL POLISHING APPARATUS

Organization Name

samsung electronics co., ltd.

Inventor(s)

Jinoh Im of Suwon-si (KR)

Seungjiun Lee of Suwon-si (KR)

IIyoung Yoon of Suwon-si (KR)

BRUSH CLEANING DEVICE AND CHEMICAL MECHANICAL POLISHING APPARATUS - A simplified explanation of the abstract

This abstract first appeared for US patent application 20240341465 titled 'BRUSH CLEANING DEVICE AND CHEMICAL MECHANICAL POLISHING APPARATUS

The abstract describes a brush cleaning device that includes a brush with an electrode, a cleaning tank, a platen with an electrode that interacts with the brush's electrode, and a voltage supplier that creates an electrical field on the brush and platen.

  • The brush has a cylindrical body with protrusions and pores, a particle collection pipe at its center, and a particle suction pipe connected to the pores.
  • The cleaning tank accommodates the brush and platen, which both have electrodes for creating an electrical field.
  • The voltage supplier supplies a voltage to form the electrical field on the brush and platen, facilitating the cleaning process.

Potential Applications: - Industrial cleaning processes - Laboratory equipment maintenance - Electronic component cleaning

Problems Solved: - Efficient removal of particles from brushes - Enhanced cleaning capabilities in hard-to-reach areas - Improved maintenance of sensitive equipment

Benefits: - Increased cleaning efficiency - Reduced downtime for maintenance - Extended lifespan of equipment

Commercial Applications: - Manufacturing facilities - Research laboratories - Electronics industry

Questions about the technology: 1. How does the interaction between the electrodes improve the cleaning process? 2. What are the advantages of using a brush with protrusions and pores for particle collection?


Original Abstract Submitted

a brush cleaning device includes a brush including an electrode therein; a cleaning tank in which the brush is accommodatable; a platen in the cleaning tank, the platen being spaced apart from the brush, and including an electrode therein that interacts with the electrode of the brush; and a voltage supplier having an electrode interacting with the electrode of the brush, and supplying a voltage to form an electrical field on the brush and the platen, wherein the brush includes a cylindrical body including a plurality of protrusions on a surface thereof, and pores in at least a portion of the plurality of protrusions; a particle collection pipe at a center of the cylindrical body; and a particle suction pipe in fluid communication with the particle collection pipe and extending radially to the pores at an outer surface of the brush.