Samsung electronics co., ltd. (20240218561). THIN-FILM DEPOSITION APPARATUS simplified abstract

THIN-FILM DEPOSITION APPARATUS

Organization Name

samsung electronics co., ltd.

Inventor(s)

Janghwi Lee of Suwon-si (KR)

Yeontae Kim of Suwon-si (KR)

Junbum Park of Suwon-si (KR)

Hunyong Park of Suwon-si (KR)

Suhwan Park of Suwon-si (KR)

Sangwoo Bae of Suwon-si (KR)

Motoshi Sakai of Suwon-si (KR)

Wondon Joo of Suwon-si (KR)

Jaeho Jin of Suwon-si (KR)

THIN-FILM DEPOSITION APPARATUS - A simplified explanation of the abstract

This abstract first appeared for US patent application 20240218561 titled 'THIN-FILM DEPOSITION APPARATUS

The thin-film deposition apparatus described in the patent application consists of a housing with a chamber, a platform for supporting a substrate, a reflector, a light source, a light receiver, an optical cable, and a sensor.

• The housing contains a chamber where the substrate is placed for thin-film deposition.
• A reflector outside the chamber directs light from a source onto the substrate.
• A light receiver inside the housing captures light emitted from the substrate through a hole in the reflector.
• An optical cable connects the light receiver to the outside of the housing.
• A sensor outside the housing analyzes the light transmitted through the optical cable to measure the substrate's temperature.

Potential Applications: - Thin-film deposition in semiconductor manufacturing - Coating processes in the optical industry - Solar cell production

Problems Solved: - Accurate temperature measurement of the substrate during deposition - Enhanced control over thin-film deposition processes

Benefits: - Improved quality and consistency of thin films - Increased efficiency in manufacturing processes - Real-time monitoring of substrate temperature

Commercial Applications: Title: "Advanced Thin-Film Deposition Apparatus for Precision Manufacturing" This technology can be utilized in industries such as semiconductor manufacturing, optical coatings, and solar cell production to enhance the quality and efficiency of thin-film deposition processes.

Questions about the technology: 1. How does the light receiver inside the housing capture light emitted from the substrate? 2. What are the potential implications of real-time monitoring of substrate temperature in thin-film deposition processes?

Original Abstract Submitted

a thin-film deposition apparatus includes: a housing; a chamber located within the housing and providing an internal space; a platform disposed within the chamber and configured to support a substrate; a reflector disposed within the housing and disposed outside the chamber; a light source disposed between opposing walls of the reflector and configured to radiate light onto the substrate; a light receiver disposed within the housing, spaced apart from the light source with a portion of the reflector therebetween, and having a hole through which light emitted from the substrate is introduced; an optical cable connected to the light receiver and extending to the outside of the housing; and a sensor disposed outside the housing, connected to the optical cable, and configured to measure a temperature of the substrate by analyzing light transmitted from the optical cable.