Samsung electronics co., ltd. (20240159657). APPARATUS FOR MEASURING RADICAL DENSITY DISTRIBUTION BASED ON LIGHT ABSORPTION AND OPERATING METHOD THEREOF simplified abstract
Contents
- 1 APPARATUS FOR MEASURING RADICAL DENSITY DISTRIBUTION BASED ON LIGHT ABSORPTION AND OPERATING METHOD THEREOF
- 1.1 Organization Name
- 1.2 Inventor(s)
- 1.3 APPARATUS FOR MEASURING RADICAL DENSITY DISTRIBUTION BASED ON LIGHT ABSORPTION AND OPERATING METHOD THEREOF - A simplified explanation of the abstract
- 1.4 Simplified Explanation
- 1.5 Potential Applications
- 1.6 Problems Solved
- 1.7 Benefits
- 1.8 Potential Commercial Applications
- 1.9 Possible Prior Art
- 1.10 Original Abstract Submitted
APPARATUS FOR MEASURING RADICAL DENSITY DISTRIBUTION BASED ON LIGHT ABSORPTION AND OPERATING METHOD THEREOF
Organization Name
Inventor(s)
Jeongmin Bang of Suwon-si (KR)
Dougyong Sung of Suwon-si (KR)
Yeongkwang Lee of Suwon-si (KR)
APPARATUS FOR MEASURING RADICAL DENSITY DISTRIBUTION BASED ON LIGHT ABSORPTION AND OPERATING METHOD THEREOF - A simplified explanation of the abstract
This abstract first appeared for US patent application 20240159657 titled 'APPARATUS FOR MEASURING RADICAL DENSITY DISTRIBUTION BASED ON LIGHT ABSORPTION AND OPERATING METHOD THEREOF
Simplified Explanation
The apparatus described in the patent application is designed to measure radical spatial density distribution using a process chamber, a moving wall, a light source, a collimator, and a spectrometer. The process involves generating light, transmitting it to the moving wall, and analyzing the reflected light to determine radical spatial density.
- Process chamber with a viewport
- Moving wall driven by a driving device
- Light source for generating light
- Collimator to transmit and receive light
- Spectrometer for analyzing reflected light
Potential Applications
The technology could be used in various industries such as semiconductor manufacturing, environmental monitoring, and medical diagnostics.
Problems Solved
This innovation solves the problem of accurately measuring radical spatial density distribution in a controlled environment.
Benefits
The benefits of this technology include precise and reliable measurements of radical spatial density, which can lead to improved process control and product quality.
Potential Commercial Applications
Potential commercial applications of this technology include quality control in manufacturing processes, environmental monitoring for pollution detection, and medical diagnostics for disease detection.
Possible Prior Art
One possible prior art could be similar devices used in research laboratories for analyzing light absorption in different materials.
Unanswered Questions
How does this technology compare to existing methods for measuring radical spatial density distribution?
This technology offers a more precise and controlled approach to measuring radical spatial density compared to traditional methods, which may rely on less accurate measurements or require more complex setups.
What are the limitations of this technology in terms of scalability and real-world application?
One limitation of this technology could be the cost of implementation and maintenance, which may make it less accessible for smaller businesses or research institutions. Additionally, the size and complexity of the apparatus may limit its use in certain environments.
Original Abstract Submitted
provided is an apparatus configured to measure radical spatial density distribution including a process chamber including a viewport, a driving device configured to move a moving wall inside the process chamber, a light source configured to generate light, a collimator disposed in the viewport of the process chamber and configured to transmit light received from the light source to the moving wall and receive light reflected from the moving wall, and a spectrometer configured to receive the reflected light from the collimator, and measure radical spatial density based on analyzing an absorption amount of a spectrum of the received light.
