Samsung display co., ltd. (20240425969). DEPOSITION SOURCE
DEPOSITION SOURCE
Organization Name
Inventor(s)
Jong Bun Han of Yongin-si (KR)
Gan Young Park of Yongin-si (KR)
DEPOSITION SOURCE
This abstract first appeared for US patent application 20240425969 titled 'DEPOSITION SOURCE
Original Abstract Submitted
a deposition source includes a first frame including a lower space of a first crucible, a lower space of a second crucible, and a first partition wall disposed between the lower space of the first crucible and the lower space of the second crucible; and a second frame including an upper space of the first crucible, an upper space of the second crucible, a first nozzle connected to the first crucible, a second nozzle connected to the second crucible, and a second partition wall disposed between the upper space of the first crucible and the upper space of the second crucible, wherein an exhaust passage is disposed between the first partition wall of the first frame and the second partition wall of the second frame, and the first partition wall contacts the second partition wall.