Samsung display co., ltd. (20240271267). DEPOSITION APPARATUS simplified abstract
Contents
DEPOSITION APPARATUS
Organization Name
Inventor(s)
JUNGHYUN Ahn of Yongin-si (KR)
SEUNGJIN Lee of Yongin-si (KR)
DEPOSITION APPARATUS - A simplified explanation of the abstract
This abstract first appeared for US patent application 20240271267 titled 'DEPOSITION APPARATUS
The deposition apparatus described in the abstract consists of a mask frame with masks arranged in a specific direction and intersecting direction, along with a magnet plate and magnet parts connected to it that can move in the selected direction.
- Mask frame with masks arranged in specific directions and intersecting directions
- Magnet plate with magnet parts that can move in the selected direction
Potential Applications: - Semiconductor manufacturing - Thin film deposition processes - Optical coatings
Problems Solved: - Precise deposition of materials - Uniform coating on substrates
Benefits: - Improved efficiency in deposition processes - Enhanced control over material deposition - Consistent coating quality
Commercial Applications: Title: Advanced Deposition Apparatus for Semiconductor Manufacturing This technology can be used in semiconductor fabrication facilities to enhance the quality and efficiency of thin film deposition processes. It can also be applied in industries requiring precise material coatings, such as optics and electronics.
Questions about the technology: 1. How does the movement of magnet parts improve the deposition process?
- The movement of magnet parts allows for better control and uniformity in material deposition, leading to higher quality coatings.
2. What are the key advantages of using a mask frame with intersecting directions?
- The intersecting directions of the masks provide versatility in deposition patterns and enhance the overall efficiency of the process.
Original Abstract Submitted
a deposition apparatus includes a mask frame having a frame shape, masks disposed on the mask frame, extending in a selected direction, disposed in an intersection direction intersecting the selected direction, and including cell areas, a magnet plate disposed on the masks, and magnet parts connected to a lower surface of the magnet plate. at least one of the plurality of magnet parts moves in the selected direction.
