Samsung display co., ltd. (20240226955). DEPOSITION APPARATUS simplified abstract
Contents
DEPOSITION APPARATUS
Organization Name
Inventor(s)
MINCHUL Song of Yongin-si (KR)
YOUNGSUN Cho of Yongin-si (KR)
DEPOSITION APPARATUS - A simplified explanation of the abstract
This abstract first appeared for US patent application 20240226955 titled 'DEPOSITION APPARATUS
The deposition apparatus described in the abstract includes a support module with multiple support parts connected to a target substrate, a base substrate, a connection member linking the support parts to the base substrate, and a mask assembly for masking the deposition material on the target substrate. The support module also features position control parts that allow the support parts to move along a direction axis perpendicular to their major surfaces.
- Support module with multiple support parts
- Base substrate connected to the support module
- Connection member linking support parts to the base substrate
- Mask assembly for masking deposition material
- Position control parts for moving support parts along a direction axis
Potential Applications: - Thin film deposition processes - Semiconductor manufacturing - Solar cell production
Problems Solved: - Precise control of deposition material - Uniform coating on target substrate - Enhanced efficiency in manufacturing processes
Benefits: - Improved deposition accuracy - Increased production yield - Cost-effective manufacturing solutions
Commercial Applications: Title: Advanced Deposition Apparatus for Precision Manufacturing This technology can be utilized in industries such as electronics, optics, and renewable energy for high-precision deposition processes, leading to improved product quality and reduced production costs.
Prior Art: Readers can explore prior patents related to deposition apparatus, position control systems, and thin film deposition methods to gain a deeper understanding of the technological advancements in this field.
Frequently Updated Research: Stay updated on the latest developments in thin film deposition techniques, position control mechanisms, and semiconductor manufacturing processes to enhance your knowledge of this innovative technology.
Questions about Deposition Apparatus: 1. How does the position control system in the support module improve deposition accuracy? 2. What are the key differences between this deposition apparatus and traditional deposition methods?
Original Abstract Submitted
a deposition apparatus includes: a support module having a plurality of support parts coupled to a target substrate; a base substrate coupled to the support module; a connection member for connecting the plurality of support parts to the base substrate; and a mask assembly configured to mask a deposition material provided to the target substrate. the support module further includes position control parts, which control the plurality of support parts to be movable along a direction axis perpendicular to a major surface of each of the support parts, respectively.
