Samsung display co., ltd. (20240200181). THIN FILM DEPOSITION APPARATUS simplified abstract

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THIN FILM DEPOSITION APPARATUS

Organization Name

samsung display co., ltd.

Inventor(s)

Choong-Ho Lee of Yongin-si (KR)

Jung-Min Lee of Yongin-si (KR)

THIN FILM DEPOSITION APPARATUS - A simplified explanation of the abstract

This abstract first appeared for US patent application 20240200181 titled 'THIN FILM DEPOSITION APPARATUS

The thin film deposition apparatus described in the patent application is designed to produce large substrates on a mass scale and improve manufacturing yield.

  • The apparatus includes a deposition source, a first nozzle with multiple slits arranged in a first direction, a second nozzle with slits arranged in the same direction, and a barrier wall assembly with barrier walls to partition the space between the nozzles.
  • This design allows for efficient and uniform deposition of thin films on large substrates, increasing productivity and reducing waste in the manufacturing process.
  • The use of multiple slits and barrier walls helps control the flow of materials and ensure consistent coating thickness across the substrate.
  • By optimizing the deposition process, this apparatus can lead to higher quality thin films and improved overall product performance.
  • The innovative features of this apparatus make it ideal for industries such as electronics, optics, and solar energy, where thin film coatings are essential for various applications.

Potential Applications: - Electronics manufacturing - Optics and lens production - Solar panel fabrication

Problems Solved: - Inefficient deposition processes - Inconsistent coating thickness - Low manufacturing yield

Benefits: - Increased productivity - Improved product quality - Reduced waste and cost savings

Commercial Applications: Title: Advanced Thin Film Deposition Apparatus for Large Substrates This technology can be used in industries such as electronics, optics, and solar energy for efficient and high-quality thin film production. The market implications include improved product performance, cost savings, and increased competitiveness in the market.

Questions about the technology: 1. How does the thin film deposition apparatus improve manufacturing yield? - The apparatus optimizes the deposition process to ensure efficient and uniform coating on large substrates, leading to higher productivity and reduced waste.

2. What industries can benefit from using this thin film deposition apparatus? - Industries such as electronics, optics, and solar energy can benefit from this technology due to its ability to produce high-quality thin films on a mass scale.


Original Abstract Submitted

a thin film deposition apparatus used to produce large substrates on a mass scale and improve manufacturing yield. the thin film deposition apparatus includes a deposition source; a first nozzle disposed at a side of the deposition source and including a plurality of first slits arranged in a first direction; a second nozzle disposed opposite to the first nozzle and including a plurality of second slits arranged in the first direction; and a barrier wall assembly including a plurality of barrier walls arranged in the first direction so as to partition a space between the first nozzle and the second nozzle.