SEMES CO., LTD. patent applications published on July 4th, 2024
Summary of the patent applications from SEMES CO., LTD. on July 4th, 2024
1. **Summary**: SEMES CO., LTD. has recently filed patents for innovative technologies in power electronics, semiconductor manufacturing, and industrial automation. These patents focus on improving efficiency, enhancing process control, and increasing productivity in various industries. The patents include an advanced snubber circuit for power electronics applications, an improved susceptor manufacturing technology, a substrate support apparatus with a dual chuck system, and an advanced gripper module for industrial automation.
2. **Key Points of Patents**: - The snubber circuit includes various components like snubber diodes, a snubber capacitor, a snubber voltage source, and a snubber inductor to protect components from overvoltage and enhance the efficiency of DC-DC converters. - The susceptor manufacturing method involves the assembly of a bush-filter between gas channels in an electrostatic chuck and a base plate for improved thermal management and process control. - The substrate support apparatus features a dual chuck system for precise substrate handling and movement, with protruding pins and alignment pins for accurate positioning. - The gripper module consists of a base plate, driving part, gripper transfer part, link block, and gripper for efficient gripping and releasing of objects in industrial automation.
3. **Notable Applications**: - These technologies can be applied in industries such as power electronics, semiconductor manufacturing, robotics, and material handling systems for improved efficiency, process control, and productivity. - The patents offer solutions to common problems in the respective fields, including minimizing voltage spikes, enhancing thermal management, ensuring precise substrate handling, and efficient object manipulation in industrial automation.
Contents
- 1 Patent applications for SEMES CO., LTD. on July 4th, 2024
- 1.1 FIRE PROTECTION APPARATUS AND FIRE PROTECTION METHOD (18395489)
- 1.2 METHOD OF CIRCULATING CHEMICAL LIQUID AND METHOD OF PROCESSING SUBSTRATE (18350252)
- 1.3 LIQUID SUPPLY UNIT AND SUBSTRATE TREATING APPARATUS (18343242)
- 1.4 APPARATUS AND METHOD FOR TREATING SUBSTRATE (18342797)
- 1.5 APPARATUS FOR SUPPLYING CHEMICALS, APPARATUS AND METHOD FOR TREATING SUBSTRATE (18351705)
- 1.6 BOWL FOR PROCESSING A SUBSTRATE AND PROCESSING SUBSTRATE DEVICE INCLUDING THE SAME (18386914)
- 1.7 SUBSTRATE TREATMENT APPARATUS AND SUBSTRATE TREATMENT METHOD (18395574)
- 1.8 SUBSTRATE TREATING APPARATUS (18125738)
- 1.9 ROBOT FOR TRANSFERRING SUBSTRATE AND APPARATUS FOR TREATING SUBSTRATE (18343774)
- 1.10 GRIPPER MODULE INCLUDING VIBRATION ABSORBER AND SUBSTRATE TRANSPORT APPARATUS INCLUDING A GRIPPER MODULE (18397123)
- 1.11 APPARATUS AND METHOD FOR MANUFACTURING PIPE (18191961)
- 1.12 INK TREATMENT APPARATUS AND METHOD (18302323)
- 1.13 SUBSTRATE MEASUREMENT METHOD AND SUBSTRATE MEASUREMENT CONTROL APPARATUS (18526423)
- 1.14 SUBSTRATE TREATING METHOD AND SUBSTRATE TREATING APPARATUS (18340535)
- 1.15 APPARATUS FOR TREATING SUBSTRATE AND METHOD FOR TREATING A SUBSTRATE (18341828)
- 1.16 CONTROL METHOD FOR SUPPORT UNIT, SUBSTRATE TREATING METHOD AND SUBSTRATE TREATING APPARATUS (18541437)
- 1.17 AIRFLOW CONTROL SYSTEM AND AIRFLOW CONTROL METHOD (18395487)
- 1.18 VALVE CONTROL DEVICE AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME (18399894)
- 1.19 SUBSTRATE PROCESSING APPARATUS AND METHOD OF CONTROLLING THE SAME (18394068)
- 1.20 APPARATUS FOR PROCESSING SUBSTRATE (18507008)
- 1.21 SUBSTRATE TREATING APPARATUS (18137287)
- 1.22 SUBSTRATE TREATING APPARATUS AND SEMICONDUCTOR MANUFACTURING EQUIPMENT INCLUDING THE SAME (18513560)
- 1.23 BOWL AND APPARATUS FOR PROCESSING SUBSTRATE (18337515)
- 1.24 SUBSTRATE PROCESSING APPARATUS AND SEMICONDUCTOR MANUFACTURING EQUIPMENT INCLUDING THE SAME (18505474)
- 1.25 SUBSTRATE TREATING APPARATUS (18539634)
- 1.26 SUBSTRATE TREATMENT SYSTEM AND SUBSTRATE TREATMENT METHOD (18542665)
- 1.27 SUBSTRATE TRANSFERRING APPARATUS, AND LIQUID PROCESSING APPARATUS AND SUBSTRATE PROCESSING EQUIPMENT INCLUDING SAME (18395570)
- 1.28 GRIPPER MODULE FOR GRIPPING A CARRIER, SUBSTRATE TRANSFER APPARATUS INCLUDING A GRIPPER MODULE, AND METHOD OF GRIPPING A CARRIER USING A GRIPPER MODULE (18396288)
- 1.29 SUBSTRATE SUPPORT APPARATUS (18393850)
- 1.30 SUSCEPTOR AND METHOD OF MANUFACTURING THE SAME (18525387)
- 1.31 SNUBBER CIRCUIT (18395263)
Patent applications for SEMES CO., LTD. on July 4th, 2024
FIRE PROTECTION APPARATUS AND FIRE PROTECTION METHOD (18395489)
Main Inventor
Eunsang YOON
METHOD OF CIRCULATING CHEMICAL LIQUID AND METHOD OF PROCESSING SUBSTRATE (18350252)
Main Inventor
Gi Hun CHOI
LIQUID SUPPLY UNIT AND SUBSTRATE TREATING APPARATUS (18343242)
Main Inventor
Soon Hyun KIM
APPARATUS AND METHOD FOR TREATING SUBSTRATE (18342797)
Main Inventor
Jun Young CHOI
APPARATUS FOR SUPPLYING CHEMICALS, APPARATUS AND METHOD FOR TREATING SUBSTRATE (18351705)
Main Inventor
In Yong JEONG
BOWL FOR PROCESSING A SUBSTRATE AND PROCESSING SUBSTRATE DEVICE INCLUDING THE SAME (18386914)
Main Inventor
Sun Wook JUNG
SUBSTRATE TREATMENT APPARATUS AND SUBSTRATE TREATMENT METHOD (18395574)
Main Inventor
Soon Hyun KIM
SUBSTRATE TREATING APPARATUS (18125738)
Main Inventor
Young Seo AN
ROBOT FOR TRANSFERRING SUBSTRATE AND APPARATUS FOR TREATING SUBSTRATE (18343774)
Main Inventor
Hee Jun YOUN
GRIPPER MODULE INCLUDING VIBRATION ABSORBER AND SUBSTRATE TRANSPORT APPARATUS INCLUDING A GRIPPER MODULE (18397123)
Main Inventor
Jaehyun LEE
APPARATUS AND METHOD FOR MANUFACTURING PIPE (18191961)
Main Inventor
Chul Jin PARK
INK TREATMENT APPARATUS AND METHOD (18302323)
Main Inventor
Dong Hwa LEE
SUBSTRATE MEASUREMENT METHOD AND SUBSTRATE MEASUREMENT CONTROL APPARATUS (18526423)
Main Inventor
Dong Seop JUNG
SUBSTRATE TREATING METHOD AND SUBSTRATE TREATING APPARATUS (18340535)
Main Inventor
Ho Jin JANG
APPARATUS FOR TREATING SUBSTRATE AND METHOD FOR TREATING A SUBSTRATE (18341828)
Main Inventor
Soo Bin YONG
CONTROL METHOD FOR SUPPORT UNIT, SUBSTRATE TREATING METHOD AND SUBSTRATE TREATING APPARATUS (18541437)
Main Inventor
Yun Sik JU
AIRFLOW CONTROL SYSTEM AND AIRFLOW CONTROL METHOD (18395487)
Main Inventor
Ickkyun KIM
VALVE CONTROL DEVICE AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME (18399894)
Main Inventor
Eunseok KIM
SUBSTRATE PROCESSING APPARATUS AND METHOD OF CONTROLLING THE SAME (18394068)
Main Inventor
Joonhwan Jang
APPARATUS FOR PROCESSING SUBSTRATE (18507008)
Main Inventor
Won Sik SON
SUBSTRATE TREATING APPARATUS (18137287)
Main Inventor
Young Seo AN
SUBSTRATE TREATING APPARATUS AND SEMICONDUCTOR MANUFACTURING EQUIPMENT INCLUDING THE SAME (18513560)
Main Inventor
Jong Seok SEO
BOWL AND APPARATUS FOR PROCESSING SUBSTRATE (18337515)
Main Inventor
Se Hyeong CHOI
SUBSTRATE PROCESSING APPARATUS AND SEMICONDUCTOR MANUFACTURING EQUIPMENT INCLUDING THE SAME (18505474)
Main Inventor
Ju Won KIM
SUBSTRATE TREATING APPARATUS (18539634)
Main Inventor
Hee Man AHN
SUBSTRATE TREATMENT SYSTEM AND SUBSTRATE TREATMENT METHOD (18542665)
Main Inventor
Young Eun JEON
SUBSTRATE TRANSFERRING APPARATUS, AND LIQUID PROCESSING APPARATUS AND SUBSTRATE PROCESSING EQUIPMENT INCLUDING SAME (18395570)
Main Inventor
Seul Gi CHOI
GRIPPER MODULE FOR GRIPPING A CARRIER, SUBSTRATE TRANSFER APPARATUS INCLUDING A GRIPPER MODULE, AND METHOD OF GRIPPING A CARRIER USING A GRIPPER MODULE (18396288)
Main Inventor
Jaehyun LEE
SUBSTRATE SUPPORT APPARATUS (18393850)
Main Inventor
Yong PARK
SUSCEPTOR AND METHOD OF MANUFACTURING THE SAME (18525387)
Main Inventor
So Hyung JIONG
SNUBBER CIRCUIT (18395263)
Main Inventor
Aixian Zhang