Murata manufacturing co., ltd. (20240345382). TWO-AXIS MEMS MIRROR simplified abstract
Contents
TWO-AXIS MEMS MIRROR
Organization Name
murata manufacturing co., ltd.
Inventor(s)
TWO-AXIS MEMS MIRROR - A simplified explanation of the abstract
This abstract first appeared for US patent application 20240345382 titled 'TWO-AXIS MEMS MIRROR
Simplified Explanation:
The MEMS mirror described in the patent application has two rotation axes and includes a frame with a reflector, piezoelectric actuators, support beams, moving comb fingers, and static comb fingers forming electrostatic actuators.
Key Features and Innovation:
- MEMS mirror with two rotation axes
- Frame with reflector and piezoelectric actuators
- Support beams with moving comb fingers and static comb fingers
- Electrostatic actuators for effective operation in quasi-static and static modes
Potential Applications: The technology can be used in optical systems, laser scanning, medical imaging, and telecommunications.
Problems Solved: The MEMS mirror maximizes tilt displacement and broadens the operating range, providing more precise control in various applications.
Benefits:
- Enhanced tilt displacement
- Increased operating range
- Effective operation in quasi-static and static modes
Commercial Applications: Potential commercial applications include laser projection systems, adaptive optics, and high-speed optical communication systems.
Prior Art: Readers can explore prior art related to MEMS mirrors, electrostatic actuators, and optical scanning systems to understand the evolution of this technology.
Frequently Updated Research: Stay updated on advancements in MEMS mirror technology, electrostatic actuators, and optical system design for potential improvements and new applications.
Questions about MEMS Mirrors: 1. How do MEMS mirrors differ from traditional mirrors in optical systems? 2. What are the main advantages of using electrostatic actuators in MEMS mirrors?
Original Abstract Submitted
a mems mirror is provided with two rotation axes. the mems mirror includes a frame with a reflector and piezoelectric actuators inside, and support beams, with moving comb fingers, which alternate with static comb fingers and form electrostatic actuators. a double device layer allows separating the static comb fingers from the rest of the parts of the mems mirror by placing them at a different device layer. the configuration maximizes the tilt displacement and broadens operating range of the mems mirror. additionally, using electrostatic comb actuator for slow drive allows effective operation in quasi-static and static modes.
