Kioxia corporation (20240422971). SEMICONDUCTOR STORAGE DEVICE WITH PILLAR
SEMICONDUCTOR STORAGE DEVICE WITH PILLAR
Organization Name
Inventor(s)
Kazuharu Yamabe of Yokkaichi Mie (JP)
SEMICONDUCTOR STORAGE DEVICE WITH PILLAR
This abstract first appeared for US patent application 20240422971 titled 'SEMICONDUCTOR STORAGE DEVICE WITH PILLAR
Original Abstract Submitted
a semiconductor storage device includes a substrate, a plurality of first conductive layers arranged in a first direction intersecting with a surface of the substrate, a first semiconductor layer that extends in the first direction and faces the plurality of first conductive layers, a first gate insulating film that extends in the first direction and covers an outer peripheral surface of the first semiconductor layer, a first insulating layer that extends in the first direction and has an outer peripheral surface covered with the first semiconductor layer, and a second conductive layer that is farther from the substrate than the plurality of first conductive layers and is connected to one end in the first direction of the first semiconductor layer. the first semiconductor layer includes a first region facing the plurality of first conductive layers and a second region farther from the substrate than the first region. the second conductive layer is connected to an inner peripheral surface and an outer peripheral surface of the second region of the first semiconductor layer and is in contact with one end in the first direction of the first insulating layer.