KLA Corporation patent applications published on October 10th, 2024
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Contents
- 1 Patent applications for KLA Corporation on October 10th, 2024
- 1.1 ASYMMETRIC GAS BEARING BUSHING FOR THERMO-PUMP (18420359)
- 1.2 SYSTEM AND METHOD TO REDUCE MEASUREMENT ERROR IN INTERFEROMETRY-BASED METROLOGY (18594707)
- 1.3 PARALLEL SCANNING OVERLAY METROLOGY WITH OPTICAL META-SURFACES (18624444)
- 1.4 SYSTEM AND METHOD FOR DETERMINING OVERLAY MEASUREMENT OF A SCANNING TARGET (18372444)
- 1.5 SYSTEM AND METHOD FOR TRACKING REAL-TIME POSITION FOR SCANNING OVERLAY METROLOGY (18372531)
Patent applications for KLA Corporation on October 10th, 2024
ASYMMETRIC GAS BEARING BUSHING FOR THERMO-PUMP (18420359)
Main Inventor
Anatoly Shchemelinin
SYSTEM AND METHOD TO REDUCE MEASUREMENT ERROR IN INTERFEROMETRY-BASED METROLOGY (18594707)
Main Inventor
Yuchi Chen
PARALLEL SCANNING OVERLAY METROLOGY WITH OPTICAL META-SURFACES (18624444)
Main Inventor
Andrew V. Hill
SYSTEM AND METHOD FOR DETERMINING OVERLAY MEASUREMENT OF A SCANNING TARGET (18372444)
Main Inventor
Itay Gdor
SYSTEM AND METHOD FOR TRACKING REAL-TIME POSITION FOR SCANNING OVERLAY METROLOGY (18372531)
Main Inventor
Itay Gdor
