KLA Corporation Patent Application Trends in 2024
KLA Corporation Patent Filing Activity
KLA Corporation patent applications in 2024
Top 10 Technology Areas
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- G06T2207/30148 (Subject of image; Context of image processing)
- G01N21/9501 ({Semiconductor wafers (manufacturing processes per se of semiconductor devices implementing a measuring step)
- Count: 9 patents
- Example: 20240230555. GAS FLOW CONFIGURATIONS FOR SEMICONDUCTOR INSPECTIONS simplified abstract (KLA Corporation)
- G06T7/001 ({using an image reference approach})
- G03F7/70633 (PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR; (phototypographic composing devices)
- H01L22/12 ({for structural parameters, e.g. thickness, line width, refractive index, temperature, warp, bond strength, defects, optical inspection, electrical measurement of structural dimensions, metallurgic measurement of diffusions (electrical measurement of diffusions)
- H01L21/67288 (Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components {; Apparatus not specifically provided for elsewhere (processes per se)
- G06T7/0004 ({Industrial image inspection})
- H01J37/244 (ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps)
- H01J37/28 (with scanning beams {()
- G01B11/272 (MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS)
Emerging Technology Areas
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- G01N21/6456 (INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES (measuring or testing processes other than immunoassay, involving enzymes or microorganisms)
- G01N21/6489 (INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES (measuring or testing processes other than immunoassay, involving enzymes or microorganisms)
- H01J37/3045 (ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps)
- G03F9/7084 ({for microlithography (measuring printed patterns for monitoring overlay)
- H01J37/261 ({Details})
- G01R31/308 (Marginal testing, e.g. by varying supply voltage (testing computers during standby operation or idle time)
- G06T2207/10152 (Image acquisition modality)
- G06T7/55 (from multiple images)
- G01N21/95 (INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES (measuring or testing processes other than immunoassay, involving enzymes or microorganisms)
- G06T7/136 (involving thresholding)
- Count: 1 patents
- Example: 20240221141. PATTERN SEGMENTATION FOR NUISANCE SUPPRESSION simplified abstract (KLA Corporation)
Top Inventors
- Amnon Manassen (7 patents)
- Vladimir Levinski (4 patents)
- Qiang Zhao of Milpitas CA (US) (4 patents)
- Avner Safrani (4 patents)
- Xiaochun Li of San Jose CA (US) (4 patents)
- Shankar Krishnan of Cupertino CA (US) (3 patents)
- Nadav Gutman (3 patents)
- Yoel Feler (3 patents)
- Daria Negri (3 patents)
- Frank Laske (3 patents)
Patent Categories
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Geographical Distribution of Inventors
Geographical Distribution of US Inventors
Categories:
- KLA Corporation
- Companies
- CPC G01N21/9501
- CPC G01N2201/0233
- CPC G01N21/9505
- CPC G01N21/31
- CPC G01N21/4738
- CPC G01N2201/127
- CPC H01J35/106
- CPC H01J35/1017
- CPC F16C33/107
- CPC H01J61/025
- CPC H01J61/16
- CPC H01J61/52
- CPC H01S3/094026
- CPC H01S3/094076
- CPC H01J2893/0063
- CPC G02B27/4244
- CPC G02B27/1086
- CPC G02B27/123
- CPC G03F1/44
- CPC H01L22/12
- CPC G06T7/73
- CPC G06T5/002
- CPC G06T7/0004
- CPC H01J37/32935
- CPC H01J37/32715
- CPC H01J2237/334
- CPC H01L21/67248
- CPC H01L21/68764
- CPC H02K3/47
- CPC H02K7/09
- CPC H02K41/031
- CPC G06T2207/20081
- CPC G06T2207/20084
- CPC G06T2207/30148
- CPC H01J37/141
- CPC H01J37/153
- CPC H01J37/147
- CPC G01N21/8806
- CPC G01N2201/025
- CPC G01J3/0229
- CPC G01J3/2823
- CPC G01J1/0407
- CPC G03F7/70316
- CPC G03F7/70633
- CPC G01B11/08
- CPC G06T7/001
- CPC G06V10/26
- CPC G06V10/30
- CPC G06V10/774
- CPC H01L21/67288
- CPC G06T5/50
- CPC G06T2207/20224
- CPC G06T2207/30168
- CPC H01L21/681
- CPC H01L21/67259
- CPC H01L22/24
- CPC G01N21/211
- CPC G01N21/956
- CPC G01N21/958
- CPC G01N2021/213
- CPC G03F1/84
- CPC G03F1/24
- CPC G03F7/70033
- CPC G05B13/0265
- CPC H01J37/21
- CPC H01J37/244
- CPC H01J37/28
- CPC H01J37/20
- CPC H01J2237/24578
- CPC H05H1/46
- CPC C01B13/10
- CPC H01J65/04
- CPC H05G2/008
- CPC G03F7/706841
- CPC G03F7/706847
- CPC G05B19/41815
- CPC G05B19/4184
- CPC G05B19/41865
- CPC H01L21/6838
- CPC H01L21/67253
- CPC G03F9/7076
- CPC G06T7/33
- CPC G06F18/40
- CPC G06F3/0481
- CPC G06T11/00
- CPC G06N20/00
- CPC G06N5/04
- CPC G06F18/24
- CPC G06F18/214
- CPC G06T2200/24
- CPC G03F7/70683
- CPC G05B19/188
- CPC H01L21/67121
- CPC G05B2219/45031
- CPC G06T7/74
- CPC G06T2207/10024
- CPC G02F1/3532
- CPC G01N21/636
- CPC G01N2021/0125
- CPC G06V10/761
- CPC G06T2207/20221
- CPC H01L27/1462
- CPC H01L27/14636
- CPC H01L27/1464
- CPC H01L27/14685
- CPC G02B1/11
- CPC G01N23/20066
- CPC G01N2223/304
- CPC G01N2223/305
- CPC G01N2223/6116
- CPC G03F1/70
- CPC H01L27/14687
- CPC H01L27/14806
- CPC G01B11/272
- CPC G01N21/4788
- CPC G01B2210/56
- CPC G03F7/706845
- CPC G01B15/00
- CPC G03F7/70655
- CPC G06F30/20
- CPC G06F30/3308
- CPC H01L21/68707
- CPC G01B11/27
- CPC G03F7/70625
- CPC G01B9/02021
- CPC G01B11/16
- CPC G01B11/161
- CPC G01B11/24
- CPC G01B11/2441
- CPC H01L22/20
- CPC G06T7/30
- CPC G06T7/0006
- CPC H01J37/06
- CPC H01J37/12
- CPC H01J2237/0451
- CPC H01J2237/04735
- CPC H01J2237/103
- CPC H01J2237/151
- CPC H01J2237/152
- CPC H01J2237/1532
- CPC H01J2237/1536
- CPC H01J2237/2448
- CPC G01B9/02043
- CPC H01L21/682
- CPC G01N23/2251
- CPC G06T7/11
- CPC G06T7/13
- CPC G06T7/70
- CPC G01N2223/07
- CPC G01N2223/418
- CPC G01N2223/507
- CPC G06T2207/10061
- CPC G06T2207/20132
- CPC G01B17/06
- CPC G01B11/0608
- CPC G01N35/00584
- CPC G06T7/344
- CPC H01J2237/2443
- CPC H01J2237/24475
- CPC F03G7/0646
- CPC H01J61/28
- CPC G06V10/24
- CPC G06T2207/30164
- CPC H01J37/3177
- CPC H05H2240/20
- CPC G06T7/12
- CPC G06T7/136
- CPC G01N21/95
- CPC G06T7/55
- CPC G06T2207/10152
- CPC G01R31/308
- CPC H01J37/261
- CPC G03F9/7084
- CPC H01J37/3045
- CPC G01N21/6489
- CPC G01N21/6456
- Patent Trends by Company in 2024