International business machines corporation (20240178292). SEPARATE EPITAXY IN MONOLITHIC STACKED AND STEPPED NANOSHEETS simplified abstract

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SEPARATE EPITAXY IN MONOLITHIC STACKED AND STEPPED NANOSHEETS

Organization Name

international business machines corporation

Inventor(s)

Indira Seshadri of Niskayuna NY (US)

Su Chen Fan of Cohoes NY (US)

Jay William Strane of Warwick NY (US)

Stuart Sieg of Albany NY (US)

Shogo Mochizuki of Mechanicville NY (US)

SEPARATE EPITAXY IN MONOLITHIC STACKED AND STEPPED NANOSHEETS - A simplified explanation of the abstract

This abstract first appeared for US patent application 20240178292 titled 'SEPARATE EPITAXY IN MONOLITHIC STACKED AND STEPPED NANOSHEETS

Simplified Explanation

The semiconductor structure described in the patent application includes semiconductor layers of two nanosheet stacks, with the second nanosheet stack having a stepped formation with respect to the first nanosheet stack. Additionally, there are first and second epitaxial growths formed adjacent to the semiconductor layers of the respective nanosheet stacks, with the second epitaxial growth having a greater volume than the first epitaxial growth.

  • Semiconductor structure with two nanosheet stacks
  • Second nanosheet stack has a stepped formation compared to the first nanosheet stack
  • First and second epitaxial growths formed adjacent to the semiconductor layers
  • Second epitaxial growth has a greater volume than the first epitaxial growth

Potential Applications

The technology described in the patent application could potentially be used in:

  • Advanced semiconductor devices
  • High-performance electronic components
  • Next-generation computing systems

Problems Solved

This technology helps address the following issues:

  • Enhancing semiconductor performance
  • Improving device efficiency
  • Enabling more compact and powerful electronic devices

Benefits

The semiconductor structure offers the following benefits:

  • Increased device speed and efficiency
  • Enhanced overall performance
  • Potential for smaller and more energy-efficient devices

Potential Commercial Applications

The technology could find commercial applications in:

  • Semiconductor manufacturing industry
  • Electronics and consumer electronics sector
  • Research and development of advanced electronic devices

Possible Prior Art

One possible prior art for this technology could be the development of semiconductor structures with multiple nanosheet stacks and epitaxial growths, but with different configurations and characteristics.

Unanswered Questions

How does the stepped formation of the second nanosheet stack impact device performance?

The article does not delve into the specific effects of the stepped formation on the performance of the semiconductor structure. Further research and testing may be needed to understand the implications fully.

What are the potential challenges in scaling up this technology for mass production?

The article does not address the scalability of the manufacturing process for this semiconductor structure. It would be essential to investigate the challenges and feasibility of large-scale production in real-world applications.


Original Abstract Submitted

a semiconductor structure is presented including semiconductor layers of a first nanosheet stack, semiconductor layers of a second nanosheet stack formed over and having a stepped nanosheet formation with respect to the semiconductor layers of the first nanosheet stack, a first epitaxial growth formed adjacent the semiconductor layers of the first nanosheet stack, and a second epitaxial growth formed adjacent the semiconductor layers of the second nanosheet stack such that the second epitaxial growth has a stepped formation with respect to the first epitaxial growth. the second epitaxial growth has a volume greater than a volume of the first epitaxial growth.