Google llc (20240427236). PROCESS CONTROL PATTERN TO IMPROVE NANOIMPRINT DETACHING PROCESS
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PROCESS CONTROL PATTERN TO IMPROVE NANOIMPRINT DETACHING PROCESS
Organization Name
Inventor(s)
Thomas Mercier of Weston FL (US)
PROCESS CONTROL PATTERN TO IMPROVE NANOIMPRINT DETACHING PROCESS
This abstract first appeared for US patent application 20240427236 titled 'PROCESS CONTROL PATTERN TO IMPROVE NANOIMPRINT DETACHING PROCESS
Original Abstract Submitted
a method of nanoimprinting a waveguide includes forming a working stamp having at least one waveguide feature pattern and at least one process control feature pattern. the working stamp is pressed into a waveguide workpiece thereby forming waveguide features in one or more functional waveguide zones of the waveguide workpiece and one or more sets of process control features in one or more regions outside of the one or more functional waveguide zones. the working stamp is detached from the waveguide workpiece.
