GOOGLE LLC (20240415027). FABRICATION SYSTEMS AND METHODS FOR FABRICATING QUANTUM HARDWARE
Contents
FABRICATION SYSTEMS AND METHODS FOR FABRICATING QUANTUM HARDWARE
Organization Name
Inventor(s)
Anthony Edward Megrant of Goleta CA (US)
Shiwen Liu of Santa Barbara CA (US)
Brian Burkett of Santa Barbara CA (US)
FABRICATION SYSTEMS AND METHODS FOR FABRICATING QUANTUM HARDWARE
This abstract first appeared for US patent application 20240415027 titled 'FABRICATION SYSTEMS AND METHODS FOR FABRICATING QUANTUM HARDWARE
Original Abstract Submitted
systems and methods for fabricating quantum hardware for use in a quantum computing system are provided. in one example, the system includes at least one metrology chamber operable to receive a workpiece. the workpiece includes a quantum structure associated with the quantum hardware. the metrology chamber includes at least one detector operable to characterize an atomic scale parameter associated with a surface of the quantum structure. the system includes at least one process chamber operable to receive the workpiece. the at least one process chamber is operable to perform a fabrication process on the quantum structure based at least in part on the atomic scale parameter. the system includes a transfer apparatus operable to transfer the workpiece between the at least one metrology chamber and the at least one process chamber without exposure to ambient.
