ENTEGRIS, INC. patent applications published on July 25th, 2024

Summary of the patent applications from ENTEGRIS, INC. on July 25th, 2024

1. **Summary**: The recent patents filed by the organization describe innovative technologies in fluid control systems, hardmask polishing, silicon-containing film formation, yttrium complexes, and porous membrane products. These patents introduce advancements in pressure regulation devices, hardmask polishing compositions, film deposition methods, chemical synthesis of yttrium complexes, and porous membrane structures. The inventions aim to enhance efficiency, precision, and performance in various industries such as manufacturing, healthcare, semiconductor fabrication, and filtration processes.

2. **Key Points of Patents**: - Advanced Pressure Regulating Device for Fluid Systems:

 * Two chambers with pressure regulating devices.
 * Precise pressure regulation in fluctuating conditions.

- Hardmask Polishing Method:

 * Composition with permanganate ion for polishing.
 * Specific hardmask components for efficient polishing.

- Silicon-Containing Film Formation:

 * Precursor composed of cyclosilazane compound.
 * Improved film deposition processes.

- Yttrium Complexes Synthesis:

 * Formation of tris(alkylcyclopentadienyl)yttrium complex.
 * Applications in chemical synthesis and catalysis.

- Porous Membrane Products:

 * Multiple membrane layers bonded for enhanced filtration.
 * Improved separation capabilities.

3. **Notable Applications**: - Fluid control systems for precise pressure regulation in manufacturing processes. - Hardmask polishing in semiconductor manufacturing for improved substrate processing. - Silicon-containing film formation for advanced electronic device manufacturing. - Yttrium complexes in chemical synthesis for pharmaceutical and materials science applications. - Porous membrane products for efficient filtration and separation processes in water treatment and food processing industries.

Patent applications for ENTEGRIS, INC. on July 25th, 2024

SPACERS FOR FILTRATION APPLICATIONS (18420661)

Main Inventor

Zhifeng Li

LAYERED MICROPOROUS MEMBRANE PRODUCTS AND RELATED METHODS (18417576)

Main Inventor

Mahesh Narkhede

YTTRIUM COMPLEXES AND RELATED METHODS (18412302)

Main Inventor

Vagulejan Balasanthiran

CYCLOSILAZANE PRECURSORS AND RELATED METHODS (18412997)

Main Inventor

DaHye Kim

COMPOSITIONS FOR POLISHING HARDMASKS AND RELATED SYSTEMS AND METHODS (18411986)

Main Inventor

Rajiv K. Singh

PRESSURE REGULATOR (18420669)

Main Inventor

Edward E. Jones