Category:Yan Chen of Fremont CA (US)
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Yan Chen of Fremont CA (US)
Executive Summary
Yan Chen of Fremont CA (US) is an inventor who has filed 5 patents. Their primary areas of innovation include Emission spectrometry (3 patents), Gas-filled discharge tubes (heating by discharge (3 patents), Details (2 patents), and they have worked with companies such as Tokyo Electron Limited (5 patents). Their most frequent collaborators include (5 collaborations), (5 collaborations), (5 collaborations).
Patent Filing Activity
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Technology Areas
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List of Technology Areas
- G01J3/443 (Emission spectrometry): 3 patents
- H01J37/32972 (Gas-filled discharge tubes (heating by discharge): 3 patents
- G01J3/0205 (Details): 2 patents
- H01J37/32926 (Gas-filled discharge tubes (heating by discharge): 2 patents
- H01J37/32146 (Gas-filled discharge tubes (heating by discharge): 1 patents
- H01J2237/24485 (ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps): 1 patents
- H01J2237/24507 (Intensity, dose or other characteristics of particle beams or electromagnetic radiation): 1 patents
- H01J2237/24585 (ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps): 1 patents
- H01J2237/334 (ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps): 1 patents
Companies
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List of Companies
- Tokyo Electron Limited: 5 patents
Collaborators
- Sergey Voronin of Albany NY (US) (5 collaborations)
- Blaze Messer of Albany NY (US) (5 collaborations)
- Joel Ng of Fremont CA (US) (5 collaborations)
- Ashawaraya Shalini of Fremont CA (US) (5 collaborations)
- Ying Zhu of Fremont CA (US) (5 collaborations)
- Da Song of Albany NY (US) (3 collaborations)
- Andrej Mitrovic of Chandler AZ (US) (2 collaborations)
- Da Song of Fremont CA (US) (2 collaborations)
Subcategories
This category has the following 3 subcategories, out of 3 total.
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Pages in category "Yan Chen of Fremont CA (US)"
The following 7 pages are in this category, out of 7 total.
1
- 17948407. Optical Emission Spectroscopy for Advanced Process Characterization simplified abstract (TOKYO ELECTRON LIMITED)
- 17972958. Method for OES Data Collection and Endpoint Detection simplified abstract (Tokyo Electron Limited)
- 17973083. Time-Resolved OES Data Collection simplified abstract (Tokyo Electron Limited)
- 18298259. Advanced OES Characterization simplified abstract (Tokyo Electron Limited)
- 18501672. OPTICAL SENSOR FOR FILM THICKNESS MEASUREMENT (Tokyo Electron Limited)
- 18535103. HYBRID MODELING FOR FILM METROLOGY (Tokyo Electron Limited)
Categories:
- Sergey Voronin of Albany NY (US)
- Blaze Messer of Albany NY (US)
- Joel Ng of Fremont CA (US)
- Ashawaraya Shalini of Fremont CA (US)
- Ying Zhu of Fremont CA (US)
- Da Song of Albany NY (US)
- Andrej Mitrovic of Chandler AZ (US)
- Da Song of Fremont CA (US)
- Yan Chen of Fremont CA (US)
- Inventors
- Inventors filing patents with Tokyo Electron Limited
