Category:Maju TOMURA

Maju TOMURA

Executive Summary

Maju TOMURA is an inventor who has filed 8 patents. Their primary areas of innovation include ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps (4 patents), {using masks} (3 patents), Gas-filled discharge tubes (heating by discharge (3 patents), and they have worked with companies such as Tokyo Electron Limited (8 patents). Their most frequent collaborators include (4 collaborations), (4 collaborations), (3 collaborations).

Patent Filing Activity

Technology Areas

List of Technology Areas

• H01J2237/334 (ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps): 4 patents
• H01L21/31144 ({using masks}): 3 patents
• H01J37/32449 (Gas-filled discharge tubes (heating by discharge): 3 patents
• H01J2237/3341 (ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps): 2 patents
• H01J37/32724 (Gas-filled discharge tubes (heating by discharge): 2 patents
• H01J37/32816 (Gas-filled discharge tubes (heating by discharge): 2 patents
• H01J37/32174 (Gas-filled discharge tubes (heating by discharge): 1 patents
• H01J37/32155 (Gas-filled discharge tubes (heating by discharge): 1 patents
• H01L21/0332 (comprising inorganic layers): 1 patents
• H01J37/32027 (Gas-filled discharge tubes (heating by discharge): 1 patents
• H01L21/0206 ({during, before or after processing of insulating layers}): 1 patents
• H01L21/31138 (to form insulating layers thereon, e.g. for masking or by using photolithographic techniques (encapsulating layers): 1 patents
• B08B5/00 (Cleaning by methods involving the use of air flow or gas flow (): 1 patents
• B08B13/00 (CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL (brushes): 1 patents
• B08B3/08 (the liquid having chemical or dissolving effect (substances used, see the relevant classes)): 1 patents
• H01L21/31116 ({by dry-etching}): 1 patents
• H01J37/32165 (Gas-filled discharge tubes (heating by discharge): 1 patents
• H01J37/32935 (Gas-filled discharge tubes (heating by discharge): 1 patents
• H01L21/3065 (Plasma etching; Reactive-ion etching): 1 patents
• H01J37/32009 (Gas-filled discharge tubes (heating by discharge): 1 patents
• H01J37/32899 (Gas-filled discharge tubes (heating by discharge): 1 patents
• H01L21/308 (using masks (): 1 patents
• H01J37/32715 (Gas-filled discharge tubes (heating by discharge): 1 patents
• H01J2237/3342 (ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps): 1 patents
• H01J2237/2001 (Maintaining constant desired temperature): 1 patents

Companies

List of Companies

• Tokyo Electron Limited: 8 patents

Collaborators

• Yoshihide KIHARA (4 collaborations)
• Satoshi OHUCHIDA (4 collaborations)
• Koki MUKAIYAMA (3 collaborations)
• Nobuyuki FUKUI (2 collaborations)
• Ryo MATSUBARA of Albany NY (US) (2 collaborations)
• Atsushi TAKAHASHI (2 collaborations)
• Yusuke WAKO (1 collaborations)
• Takuto KIKUCHI (1 collaborations)
• Ryutaro SUDA (1 collaborations)
• Noboru SAITO (1 collaborations)
• Yuta NAKANE (1 collaborations)
• Shinya ISHIKAWA (1 collaborations)