Category:Kohei SAITO

Kohei SAITO

Executive Summary

Kohei SAITO is an inventor who has filed 3 patents. Their primary areas of innovation include {by liquid etching only} (2 patents), {during, before or after processing of insulating layers} (1 patents), {for structural parameters, e.g. thickness, line width, refractive index, temperature, warp, bond strength, defects, optical inspection, electrical measurement of structural dimensions, metallurgic measurement of diffusions (electrical measurement of diffusions (1 patents), and they have worked with companies such as TOKUYAMA CORPORATION (3 patents). Their most frequent collaborators include (2 collaborations), (2 collaborations), (2 collaborations).

Patent Filing Activity

Technology Areas

List of Technology Areas

• H01L21/32134 ({by liquid etching only}): 2 patents
• H01L21/02068 ({during, before or after processing of insulating layers}): 1 patents
• H01L22/12 ({for structural parameters, e.g. thickness, line width, refractive index, temperature, warp, bond strength, defects, optical inspection, electrical measurement of structural dimensions, metallurgic measurement of diffusions (electrical measurement of diffusions): 1 patents
• H01L21/566 (SEMICONDUCTOR DEVICES NOT COVERED BY CLASS): 1 patents
• C09K13/04 (MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE): 1 patents
• H01L21/6835 ({using temporarily an auxiliary support}): 1 patents
• H01L21/30604 (Chemical or electrical treatment, e.g. electrolytic etching (to form insulating layers): 1 patents

Companies

List of Companies

• TOKUYAMA CORPORATION: 3 patents

Collaborators

• Yuki KIKKAWA (2 collaborations)
• Tomoaki SATO (2 collaborations)
• Takayuki NEGISHI (2 collaborations)
• Hiroto YARIMIZU (1 collaborations)
• Takafumi SHIMODA (1 collaborations)