Category:Akira FUKUNAGA

Akira FUKUNAGA

Executive Summary

Akira FUKUNAGA is an inventor who has filed 3 patents. Their primary areas of innovation include CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL (brushes (2 patents), CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL (brushes (2 patents), Cleaning by methods involving the use of tools (cleaning hollow articles by methods or apparatus specially adapted thereto (1 patents), and they have worked with companies such as EBARA CORPORATION (3 patents). Their most frequent collaborators include (2 collaborations), (2 collaborations), (2 collaborations).

Patent Filing Activity

Technology Areas

List of Technology Areas

• B08B13/00 (CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL (brushes): 2 patents
• B08B1/04 (CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL (brushes): 2 patents
• B08B1/007 (Cleaning by methods involving the use of tools (cleaning hollow articles by methods or apparatus specially adapted thereto): 1 patents
• B08B1/002 (Cleaning by methods involving the use of tools (cleaning hollow articles by methods or apparatus specially adapted thereto): 1 patents
• B08B1/02 (CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL (brushes): 1 patents
• B08B3/041 ({Cleaning travelling work}): 1 patents
• H01L21/67046 (Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components {; Apparatus not specifically provided for elsewhere (processes per se): 1 patents
• H01L22/12 ({for structural parameters, e.g. thickness, line width, refractive index, temperature, warp, bond strength, defects, optical inspection, electrical measurement of structural dimensions, metallurgic measurement of diffusions (electrical measurement of diffusions): 1 patents
• B24B37/005 (Control means for lapping machines or devices): 1 patents
• B24B37/0056 (Control means for lapping machines or devices): 1 patents
• B24B37/015 (Temperature control): 1 patents
• B24B37/044 (designed for working plane surfaces): 1 patents
• H01L21/3212 ({by chemical mechanical polishing [CMP]}): 1 patents
• B08B3/08 (the liquid having chemical or dissolving effect (substances used, see the relevant classes)): 1 patents
• B08B1/003 (Cleaning by methods involving the use of tools (cleaning hollow articles by methods or apparatus specially adapted thereto): 1 patents

Companies

List of Companies

• EBARA CORPORATION: 3 patents

Collaborators

• Megumi UNO (2 collaborations)
• Chikako TAKATOH (2 collaborations)
• Yumiko NAKAMURA (2 collaborations)
• Katsuhide WATANABE (1 collaborations)
• Itsuki KOBATA (1 collaborations)
• Manabu TSUJIMURA (1 collaborations)