Canon kabushiki kaisha (20240210843). CONTROL APPARATUS, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING METHOD simplified abstract

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CONTROL APPARATUS, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING METHOD

Organization Name

canon kabushiki kaisha

Inventor(s)

NOZOMU Hayashi of Tochigi (JP)

CONTROL APPARATUS, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING METHOD - A simplified explanation of the abstract

This abstract first appeared for US patent application 20240210843 titled 'CONTROL APPARATUS, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING METHOD

Simplified Explanation:

This patent application describes a control apparatus for managing the position of a movable object. The apparatus includes a measurer to track the object's position, a feedback controller to adjust the position based on a target value, and a controller to oversee the measurer's operations. The measurer uses an image sensor with multiple pixels, and the controller adjusts the pixel's charge accumulation period to improve measurement accuracy.

  • The control apparatus measures and adjusts the position of a movable object using feedback control.
  • The measurer includes an image sensor with multiple pixels for accurate position tracking.
  • The controller adjusts the charge accumulation period of the pixels to enhance measurement accuracy.
  • The feedback controller reduces deviations between the measured position and the target value.
  • The apparatus repeats the measurement process multiple times in a predetermined cycle for improved accuracy.

Potential Applications: - Robotics - Automated manufacturing - Surveillance systems - Autonomous vehicles - Medical imaging

Problems Solved: - Ensures precise positioning of movable objects - Reduces measurement errors - Enhances overall system accuracy

Benefits: - Improved control over movable objects - Enhanced accuracy in position tracking - Increased efficiency in various applications

Commercial Applications: Title: Advanced Position Control System for Industrial Automation This technology can be utilized in industries such as manufacturing, robotics, and surveillance for precise control and accurate positioning of objects. The market implications include increased efficiency, reduced errors, and improved overall performance in automated systems.

Questions about Position Control Technology: 1. How does the feedback controller reduce deviations in the measured position? 2. What are the potential applications of this technology in the medical field?


Original Abstract Submitted

a control apparatus for controlling a position of a movable object is provided. the apparatus includes a measurer configured to measure the position of the movable object, a feedback controller configured to perform feedback control of the position of the movable object in a predetermined cycle so as to reduce a deviation of a measurement value obtained by the measurer with respect to a target value, and a controller configured to control the measurer. the measurer includes an image sensor including a plurality of pixels, and the controller adjusts a charge accumulation period of the pixels so that the measurement is repeatedly performed n times (n is an integer not less than 2) in the predetermined cycle, and the measurer provides a statistic value of obtained n measurement values to the feedback controller.

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