Canon kabushiki kaisha (20240192612). METHOD AND APPARATUS FOR IDENTIFYING POSITIONS OF A SPATIAL LIGHT MODULATOR RELATIVE TO A TEMPLATE EDGE simplified abstract

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METHOD AND APPARATUS FOR IDENTIFYING POSITIONS OF A SPATIAL LIGHT MODULATOR RELATIVE TO A TEMPLATE EDGE

Organization Name

canon kabushiki kaisha

Inventor(s)

Mehul N. Patel of Austin TX (US)

METHOD AND APPARATUS FOR IDENTIFYING POSITIONS OF A SPATIAL LIGHT MODULATOR RELATIVE TO A TEMPLATE EDGE - A simplified explanation of the abstract

This abstract first appeared for US patent application 20240192612 titled 'METHOD AND APPARATUS FOR IDENTIFYING POSITIONS OF A SPATIAL LIGHT MODULATOR RELATIVE TO A TEMPLATE EDGE

The patent application describes a method for identifying pixels corresponding to an imprint field edge, generating pixel patterns for imprinting a test imprint field with spatially modulated light.

  • Method for identifying pixels near the imprint field edge
  • Generation of pixel patterns with edge and central pixels
  • Imprinting the test imprint field with spatially modulated light
  • Different edge pixels selected for each pixel pattern
  • Use of at least one pixel pattern from the set of pixel patterns

Potential Applications:

  • Nanotechnology
  • Semiconductor manufacturing
  • Photolithography processes

Problems Solved:

  • Accurate identification of imprint field edges
  • Precise modulation of light for imprinting

Benefits:

  • Improved resolution in imprinting processes
  • Enhanced control over edge definition

Commercial Applications:

  • Semiconductor industry for advanced chip manufacturing
  • Nanotechnology companies for high-precision patterning

Questions about the technology: 1. How does this method improve the accuracy of imprinting processes? 2. What are the potential cost savings for companies implementing this technology?

Frequently Updated Research: Research on advanced light modulation techniques for imprint lithography.


Original Abstract Submitted

a method for identifying pixels corresponding to an imprint field edge. generating a set of pixel patterns, each pixel pattern from the set of pixel patterns including edge pixels predicted to be near the imprint field edge of a test imprint field and central pixels corresponding to a center portion of the test imprint field, wherein the edge pixels are turned on, each pixel pattern from the set of pixel patterns having different edge pixels selected and imprinting the test imprint field with a spatially modulated light source that is modulated with at least one pixel pattern from the set of pixel patterns.

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