Applied materials, inc. (20250092491). ALLOY COMPOSITION FOR CORROSION RESISTANCE
ALLOY COMPOSITION FOR CORROSION RESISTANCE
Organization Name
Inventor(s)
Chien-Min Liao of Santa Clara CA US
Hyeon Geu Kim of Santa Clara CA US
Andrew Nguyen of San Jose CA US
Hari Ponnekanti of San Jose CA US
Mingdong Li of Santa Clara CA US
Changgong Wang of San Jose CA US
ALLOY COMPOSITION FOR CORROSION RESISTANCE
This abstract first appeared for US patent application 20250092491 titled 'ALLOY COMPOSITION FOR CORROSION RESISTANCE
Original Abstract Submitted
described herein is a chamber component having a body comprising one or more aluminum alloy compositions. a surface of the chamber component has an aluminum alloy composition comprising aluminum (al), wherein the al is included in an amount of about 85 wt % to about 98 wt %, based on total weight of the alloy composition, and magnesium (mg), wherein the mg is included in an amount of about 1 wt % to about 5 wt %, based on total weight of the alloy composition. the aluminum alloy composition further includes one or more additional chemical elements that form an equiaxed grain structure of an aluminum matrix of the alloy composition.
- Applied materials, inc.
- Chien-Min Liao of Santa Clara CA US
- Chao Liu of San Jose CA US
- Tom Cho of Los Altos CA US
- Hyeon Geu Kim of Santa Clara CA US
- Andrew Nguyen of San Jose CA US
- Hari Ponnekanti of San Jose CA US
- Mingdong Li of Santa Clara CA US
- Changgong Wang of San Jose CA US
- Bruce Alger of San Jose CA US
- C22C21/06
- B22F1/16
- B22F1/17
- H01J37/32
- H01L21/683
- H01L21/687
- CPC C22C21/06