Applied materials, inc. (20250004438). DISTURBANCE COMPENSATION FOR SUBSTRATE PROCESSING RECIPES
DISTURBANCE COMPENSATION FOR SUBSTRATE PROCESSING RECIPES
Organization Name
Inventor(s)
Atilla Kilicarslan of Mountain View CA US
Raechel Chu-Hui Tan of Oakland CA US
Brooke Elise Montgomery of Morgan Hill CA US
Paul Z. Wirth of Kalispell MT US
DISTURBANCE COMPENSATION FOR SUBSTRATE PROCESSING RECIPES
This abstract first appeared for US patent application 20250004438 titled 'DISTURBANCE COMPENSATION FOR SUBSTRATE PROCESSING RECIPES
Original Abstract Submitted
a method includes determining, based at least in part on disturbance data, an actuation value associated with compensating for disturbance in a processing chamber. the method further includes associating the actuation value with an identifier corresponding to a recipe operation. the actuation value is to be retrieved, via the identifier, for subsequent execution of the recipe operation. the method further includes causing, based on retrieval of the actuation value via the identifier, actuation of one or more components of the processing chamber during a subsequent execution of the recipe operation to compensate for the disturbance.