Applied materials, inc. (20240339352). SUSCEPTOR FOR PROCESS CHAMBER simplified abstract
Contents
SUSCEPTOR FOR PROCESS CHAMBER
Organization Name
Inventor(s)
Zhepeng Cong of San Jose CA (US)
Nimrod Smith of Cupertino CA (US)
Zuoming Zhu of Sunnyvale CA (US)
Surendra Singh Srivastava of Santa Clara CA (US)
SUSCEPTOR FOR PROCESS CHAMBER - A simplified explanation of the abstract
This abstract first appeared for US patent application 20240339352 titled 'SUSCEPTOR FOR PROCESS CHAMBER
The abstract describes a substrate support assembly consisting of a susceptor assembly with an inner portion and an outer portion, as well as a first plurality of lift pins.
- The susceptor assembly includes an inner body, an outer rim, and recessed portions that are lower than the inner body's lower surface.
- The outer portion has an inner ledge where the outer rim of the inner portion rests.
- The first plurality of lift pins underlies the recessed portions of the inner portion of the susceptor assembly.
Potential Applications: - Semiconductor manufacturing - Thin film deposition processes - Solar panel production
Problems Solved: - Ensures uniform heating of substrates - Facilitates precise positioning of substrates - Enhances overall process efficiency
Benefits: - Improved thermal performance - Enhanced substrate handling capabilities - Increased production yield
Commercial Applications: Title: Advanced Substrate Support Assembly for Semiconductor Manufacturing This technology can be utilized in semiconductor fabrication facilities to enhance production efficiency and product quality. It can also be applied in other industries requiring precise substrate heating and handling.
Prior Art: Readers can explore prior patents related to substrate support assemblies in the semiconductor industry to gain a deeper understanding of the technological advancements in this field.
Frequently Updated Research: Researchers are constantly exploring new materials and designs to further improve substrate support assemblies for various industrial applications.
Questions about Substrate Support Assemblies: 1. How does the design of the susceptor assembly contribute to substrate heating efficiency?
- The recessed portions and outer rim help to evenly distribute heat across the substrate, ensuring uniform heating.
2. What are the key advantages of using lift pins in substrate support assemblies?
- Lift pins enable precise positioning and handling of substrates, leading to improved process control and yield.
Original Abstract Submitted
a substrate support assembly is provided including: a susceptor assembly that includes an inner portion having an inner body, an outer rim disposed around the inner body, and a plurality of recessed portions, each recessed portion recessed relative to a lower surface of the inner body; and an outer portion positioned around the inner portion, the outer portion including an inner ledge. the outer rim of the inner portion is positioned on the inner ledge of the outer portion; and a first plurality of lift pins. each lift pin of the first plurality of lift pins underlies one of the recessed portions of the inner portion of the susceptor assembly.
