Applied materials, inc. (20240339347). INTEGRATED SUBSTRATE MEASUREMENT SYSTEM simplified abstract

INTEGRATED SUBSTRATE MEASUREMENT SYSTEM

Organization Name

applied materials, inc.

Inventor(s)

Patricia Schulze of Giddings TX (US)

Gregory John Freeman of Austin TX (US)

Michael Kutney of Santa Clara CA (US)

Arunkumar Ramachandraiah of Bengaluru (IN)

Chih Chung Chou of San Jose CA (US)

Zhaozhao Zhu of Milpitas CA (US)

Ozkan Celik of Cedar Park TX (US)

INTEGRATED SUBSTRATE MEASUREMENT SYSTEM - A simplified explanation of the abstract

This abstract first appeared for US patent application 20240339347 titled 'INTEGRATED SUBSTRATE MEASUREMENT SYSTEM

Simplified Explanation: The optical measurement device described in the patent application includes a substrate holder, actuators to move the holder, sensors to capture measurements of target positions on the substrate, and a processing device to control the actuators and analyze the measurements.

• The device has a plate that provides vibration isolation for stable measurements.
• The substrate holder, actuators, sensors, and processing device are all mounted on the plate.
• The sensors generate measurements of target positions on the substrate for analysis.
• The processing device controls the actuators and processes the measurements for accurate optical measurements.
• The device is designed for precise optical measurements in a manufacturing environment.

Potential Applications: 1. Quality control in semiconductor manufacturing. 2. Metrology for precision engineering. 3. Optical inspection in the automotive industry.

Problems Solved: 1. Ensures stable and accurate optical measurements. 2. Provides vibration isolation for precise readings. 3. Enables automated control of substrate movement.

Benefits: 1. Improved accuracy in optical measurements. 2. Enhanced quality control in manufacturing processes. 3. Increased efficiency in metrology applications.

Commercial Applications: Optical measurement devices like this one can be used in industries such as semiconductor manufacturing, precision engineering, and automotive production to ensure quality control and precision measurements.

Questions about Optical Measurement Devices: 1. How does the vibration isolation provided by the plate improve the accuracy of optical measurements? 2. What are the key advantages of having sensors to capture measurements of target positions on the substrate?

Original Abstract Submitted

an optical measurement device comprises a substrate holder to secure a substrate, a plurality of actuators to move the substrate holder relative to a plurality of axes, a first sensor to generate one or more first measurements or images of a first plurality of target positions on the substrate, and a second sensor to generate one or more second measurements of a second plurality of target positions on the substrate. the optical measurement device further comprises a plate, wherein the substrate holder, the plurality of actuators, the first sensor and the second sensor are each mounted to the plate, and wherein the plate provides vibration isolation from a factory interface to which the optical measurement device mounts. the optical measurement device further comprises a processing device that executes instructions to control the plurality of actuators and process the first measurements or images and the second measurements.