Applied materials, inc. (20240339301). CCP GAS DELIVERY NOZZLE simplified abstract
Contents
CCP GAS DELIVERY NOZZLE
Organization Name
Inventor(s)
Yogananda Sarode Vishwanath of Bangalore (IN)
Andrew Nguyen of San Jose CA (US)
Tom K. Cho of Los Altos Hills CA (US)
CCP GAS DELIVERY NOZZLE - A simplified explanation of the abstract
This abstract first appeared for US patent application 20240339301 titled 'CCP GAS DELIVERY NOZZLE
Simplified Explanation: The patent application discusses structures, methods, and systems for additive manufacturing of components of a source and gas delivery nozzle assembly. One example structure is a unitary gas distribution nozzle assembly made of a single material, with multiple joining structures and gas zone divider walls to transfer RF energy and thermal energy and separate plenum chambers.
Key Features and Innovation:
- Additive manufacturing of components for source and gas delivery nozzle assembly
- Unitary gas distribution nozzle assembly made of a single material
- Multiple joining structures for transferring RF energy and thermal energy
- Gas zone divider walls to separate plenum chambers
Potential Applications: This technology can be used in various industries such as aerospace, automotive, and electronics for manufacturing components with precise gas distribution requirements.
Problems Solved: This technology addresses the need for efficient and precise gas distribution in manufacturing processes, improving overall product quality and consistency.
Benefits:
- Enhanced gas distribution efficiency
- Improved product quality and consistency
- Cost-effective additive manufacturing process
Commercial Applications: Potential commercial applications include additive manufacturing services for industries requiring precise gas distribution in their components, such as semiconductor manufacturing and aerospace engineering.
Prior Art: Readers can explore prior art related to gas distribution nozzles, additive manufacturing, and RF energy transfer in manufacturing processes.
Frequently Updated Research: Stay updated on advancements in additive manufacturing techniques, materials science, and gas distribution technology for potential improvements in this technology.
Questions about Gas Distribution Nozzles: 1. How does additive manufacturing impact the efficiency of gas distribution in components? 2. What are the key considerations when designing gas distribution systems for additive manufacturing processes?
Original Abstract Submitted
example structures, methods, and systems for additive manufacturing of components of source and gas delivery nozzle assembly are disclosed. one example structure includes a unitary gas distribution nozzle assembly that includes an upper electrode portion and a lower electrode portion joined by multiple joining structures, and one or more gas zone divider walls positioned between the upper electrode portion and the lower electrode portion. the unitary gas distribution nozzle assembly is of a single material. each of the multiple joining structures is positioned between the upper electrode portion and the lower electrode portion. each of the multiple joining structures is configured to transfer radio-frequency (rf) energy and thermal energy between the upper electrode portion and the lower electrode portion. the one or more gas zone divider walls are configured to separate a region between the upper electrode portion and the lower electrode portion into two or more plenum chambers.
