Applied Materials, Inc. patent applications published on September 26th, 2024
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Contents
- 1 Patent applications for Applied Materials, Inc. on September 26th, 2024
- 1.1 COMPRESSION GAP CONTROL FOR PAD-BASED CHEMICAL BUFF POST CMP CLEANING (18123746)
- 1.2 RETAINING RING HAVING INNER SURFACES WITH FEATURES (18736281)
- 1.3 MULTI-THERMAL CVD CHAMBERS WITH SHARED GAS DELIVERY AND EXHAUST SYSTEM (18733504)
- 1.4 HIGH REFRACTIVE INDEX IMPRINT COMPOSITIONS AND MATERIALS AND PROCESSES FOR MAKING THE SAME (18678002)
- 1.5 EUV SENSITIVE METAL OXIDE MATERIAL AS UNDERLAYER FOR THIN CAR TO IMPROVE PATTERN TRANSFER (18581290)
- 1.6 SYSTEM AND METHOD OF CLEANING PROCESS CHAMBER COMPONENTS (18732080)
- 1.7 INDIRECT PLASMA HEALTH MONITORING (18124401)
- 1.8 SELECTIVE OXIDATION PROCESSES FOR GATE-ALL-AROUND TRANSISTORS (18603360)
- 1.9 PROCESSES TO DEPOSIT AMORPHOUS-SILICON ETCH PROTECTION LINER (18680496)
- 1.10 SENSORS AND SYSTEM FOR IN-SITU EDGE RING EROSION MONITOR (18676429)
- 1.11 TUNABLE TEMPERATURE CONTROLLED SUBSTRATE SUPPORT ASSEMBLY (18679357)
- 1.12 ULTRA-THIN LAYERS BY SELECTIVE PASSIVATION (18123101)
- 1.13 METHOD TO IMPROVE INTERCONNECT COEFFICIENT OF THERMAL EXPANSION (18186656)
- 1.14 FABRICATION OF HIGH ASPECT RATIO ELECTRONIC DEVICES WITH MINIMAL SIDEWALL SPACER LOSS (18606739)
- 1.15 ON-THE-FLY MEASUREMENT OF SUBSTRATE STRUCTURES (18611531)
- 1.16 PRECLEAN AND ENCAPSULATION OF MICROLED FEATURES (18736157)
Patent applications for Applied Materials, Inc. on September 26th, 2024
COMPRESSION GAP CONTROL FOR PAD-BASED CHEMICAL BUFF POST CMP CLEANING (18123746)
Main Inventor
Clinton P. SAKATA
RETAINING RING HAVING INNER SURFACES WITH FEATURES (18736281)
Main Inventor
Steven Mark Reedy
MULTI-THERMAL CVD CHAMBERS WITH SHARED GAS DELIVERY AND EXHAUST SYSTEM (18733504)
Main Inventor
Zhiyuan YE
HIGH REFRACTIVE INDEX IMPRINT COMPOSITIONS AND MATERIALS AND PROCESSES FOR MAKING THE SAME (18678002)
Main Inventor
Amita JOSHI
EUV SENSITIVE METAL OXIDE MATERIAL AS UNDERLAYER FOR THIN CAR TO IMPROVE PATTERN TRANSFER (18581290)
Main Inventor
ZHENXING HAN
SYSTEM AND METHOD OF CLEANING PROCESS CHAMBER COMPONENTS (18732080)
Main Inventor
Jongyun KIM
INDIRECT PLASMA HEALTH MONITORING (18124401)
Main Inventor
Tobin Kaufman-Osborn
SELECTIVE OXIDATION PROCESSES FOR GATE-ALL-AROUND TRANSISTORS (18603360)
Main Inventor
Byeong Chan Lee
PROCESSES TO DEPOSIT AMORPHOUS-SILICON ETCH PROTECTION LINER (18680496)
Main Inventor
Zeqing SHEN
SENSORS AND SYSTEM FOR IN-SITU EDGE RING EROSION MONITOR (18676429)
Main Inventor
Yaoling PAN
TUNABLE TEMPERATURE CONTROLLED SUBSTRATE SUPPORT ASSEMBLY (18679357)
Main Inventor
Vijay D. PARKHE
ULTRA-THIN LAYERS BY SELECTIVE PASSIVATION (18123101)
Main Inventor
Zhiyuan Wu
METHOD TO IMPROVE INTERCONNECT COEFFICIENT OF THERMAL EXPANSION (18186656)
Main Inventor
Tyler Sherwood
FABRICATION OF HIGH ASPECT RATIO ELECTRONIC DEVICES WITH MINIMAL SIDEWALL SPACER LOSS (18606739)
Main Inventor
Hao Jiang
ON-THE-FLY MEASUREMENT OF SUBSTRATE STRUCTURES (18611531)
Main Inventor
Amikam Sade
PRECLEAN AND ENCAPSULATION OF MICROLED FEATURES (18736157)
Main Inventor
Thomas Joseph Knisley
