Applied Materials, Inc. patent applications published on May 30th, 2024
Summary of the patent applications from Applied Materials, Inc. on May 30th, 2024
Applied Materials, Inc. has recently filed patents related to various methods and technologies in the semiconductor industry. These patents include a linear accelerator assembly for ion implanters, a gap fill method for semiconductor devices, a calibration jig for height-adjustable edge rings, and a method for conducting radical treatment operations on substrates before annealing.
Summary of Recent Patents: - Linear accelerator assembly for ion implanters with coil resonator and drift tubes. - Gap fill method for semiconductor devices involving sacrificial Si and metal layers. - Calibration jig for height-adjustable edge rings using sensors and contact pads. - Method for radical treatment operations on substrates before annealing.
Notable Applications: - Semiconductor manufacturing for ion implantation processes. - Fabrication of integrated circuits and electronic devices. - Industries requiring precise calibration of equipment. - Processing semiconductor substrates efficiently.
These patents showcase Applied Materials, Inc.'s commitment to developing innovative technologies for improving semiconductor manufacturing processes, enhancing product quality, and increasing efficiency in the industry.
Contents
- 1 Patent applications for Applied Materials, Inc. on May 30th, 2024
- 1.1 DEFORMABLE SUBSTRATE CHUCK (18436499)
- 1.2 MATERIALS ENGINEERING FOR ANTI-COKING COATING STACKS (18071391)
- 1.3 LOW RESISTIVITY GAPFILL (18512894)
- 1.4 GAS RECYCLING SYSTEMS, SUBSTRATE PROCESSING SYSTEMS, AND RELATED APPARATUS AND METHODS FOR SEMICONDUCTOR MANUFACTURING (18070010)
- 1.5 REFLECTOR PLATE FOR SUBSTRATE PROCESSING (18519913)
- 1.6 SUBSTRATE DEFECT ANALYSIS (18072171)
- 1.7 DETERMINING EQUIPMENT CONSTANT UPDATES BY MACHINE LEARNING (18070448)
- 1.8 COMMUNICATION NODE TO INTERFACE BETWEEN EVALUATION SYSTEMS AND A MANUFACTURING SYSTEM (18432525)
- 1.9 ADJUSTING CHAMBER PERFORMANCE BY EQUIPMENT CONSTANT UPDATES (18070453)
- 1.10 CHAMBER MATCHING BY EQUIPMENT CONSTANT UPDATES (18070456)
- 1.11 DETERMINING EQUIPMENT CONSTANT UPDATES BY MACHINE LEARNING (18542562)
- 1.12 MODELING FOR INDEXING AND SEMICONDUCTOR DEFECT IMAGE RETRIEVAL (18070744)
- 1.13 Lattice Based Voltage Standoff (18070640)
- 1.14 SYSTEM AND METHODS FOR IMPLEMENTING A MICRO PULSING SCHEME USING DUAL INDEPENDENT PULSERS (18059658)
- 1.15 SOLID-STATE SWITCH BASED HIGH-SPEED PULSER WITH PLASMA IEDF MODIFICATION CAPABILITY THROUGH MULTILEVEL OUTPUT FUNCTIONALITY (18059222)
- 1.16 OXIDATION CONFORMALITY IMPROVEMENT WITH IN-SITU INTEGRATED PROCESSING (18523455)
- 1.17 METHODS, SYSTEMS, AND APPARATUS FOR CONDUCTING A RADICAL TREATMENT OPERATION PRIOR TO CONDUCTING AN ANNEALING OPERATION (18437058)
- 1.18 CALIBRATION JIG AND CALIBRATION METHOD (18435175)
- 1.19 Method for Gapfill (18083075)
- 1.20 LINEAR ACCELERATOR ASSEMBLY INCLUDING FLEXIBLE HIGH-VOLTAGE CONNECTION (18431579)
Patent applications for Applied Materials, Inc. on May 30th, 2024
DEFORMABLE SUBSTRATE CHUCK (18436499)
Main Inventor
Steven M. Zuniga
MATERIALS ENGINEERING FOR ANTI-COKING COATING STACKS (18071391)
Main Inventor
Sukti CHATTERJEE
LOW RESISTIVITY GAPFILL (18512894)
Main Inventor
Tsung-Han Yang
GAS RECYCLING SYSTEMS, SUBSTRATE PROCESSING SYSTEMS, AND RELATED APPARATUS AND METHODS FOR SEMICONDUCTOR MANUFACTURING (18070010)
Main Inventor
Mukhles SOWWAN
REFLECTOR PLATE FOR SUBSTRATE PROCESSING (18519913)
Main Inventor
Wolfgang R. ADERHOLD
SUBSTRATE DEFECT ANALYSIS (18072171)
Main Inventor
Seng Keong Lim
DETERMINING EQUIPMENT CONSTANT UPDATES BY MACHINE LEARNING (18070448)
Main Inventor
Sidharth Bhatia
COMMUNICATION NODE TO INTERFACE BETWEEN EVALUATION SYSTEMS AND A MANUFACTURING SYSTEM (18432525)
Main Inventor
Michael Howells
ADJUSTING CHAMBER PERFORMANCE BY EQUIPMENT CONSTANT UPDATES (18070453)
Main Inventor
Sidharth Bhatia
CHAMBER MATCHING BY EQUIPMENT CONSTANT UPDATES (18070456)
Main Inventor
Sidharth Bhatia
DETERMINING EQUIPMENT CONSTANT UPDATES BY MACHINE LEARNING (18542562)
Main Inventor
Thomas Ho Fai Li
MODELING FOR INDEXING AND SEMICONDUCTOR DEFECT IMAGE RETRIEVAL (18070744)
Main Inventor
Yuanhong Guo
Lattice Based Voltage Standoff (18070640)
Main Inventor
Adam M. McLaughlin
SYSTEM AND METHODS FOR IMPLEMENTING A MICRO PULSING SCHEME USING DUAL INDEPENDENT PULSERS (18059658)
Main Inventor
A N M Wasekul AZAD
SOLID-STATE SWITCH BASED HIGH-SPEED PULSER WITH PLASMA IEDF MODIFICATION CAPABILITY THROUGH MULTILEVEL OUTPUT FUNCTIONALITY (18059222)
Main Inventor
Kartik RAMASWAMY
OXIDATION CONFORMALITY IMPROVEMENT WITH IN-SITU INTEGRATED PROCESSING (18523455)
Main Inventor
Hansel LO
METHODS, SYSTEMS, AND APPARATUS FOR CONDUCTING A RADICAL TREATMENT OPERATION PRIOR TO CONDUCTING AN ANNEALING OPERATION (18437058)
Main Inventor
Pradeep SAMPATH KUMAR
CALIBRATION JIG AND CALIBRATION METHOD (18435175)
Main Inventor
Andrew MYLES
Method for Gapfill (18083075)
Main Inventor
Yi XU
LINEAR ACCELERATOR ASSEMBLY INCLUDING FLEXIBLE HIGH-VOLTAGE CONNECTION (18431579)
Main Inventor
David T. BLAHNIK
