Applied Materials, Inc. patent applications published on July 4th, 2024

Summary of the patent applications from Applied Materials, Inc. on July 4th, 2024

1. **Summary**: Applied Materials, Inc. has recently filed patents for innovative technologies in semiconductor manufacturing processes. These patents include methods for controlling substrate temperature during deposition, achieving improved device performance without annealing, removing metal oxides from substrate surfaces, and efficient cleaning and drying modules. These technologies aim to enhance product quality, optimize manufacturing processes, and reduce waste.

2. **Key Points of Patents**:

  * Real-time monitoring of substrate temperature and adaptive control based on defect analysis.
  * Methods for achieving desired dipole effect without annealing in electronic devices.
  * Process involving hydrogen plasma and RF pulses for efficient removal of metal oxides.
  * Cleaning and drying module with a collection rotor and exhaust for substrate cleaning.

3. **Notable Applications**:

  * Semiconductor manufacturing for improved product quality and efficiency.
  * Production of advanced electronic devices with enhanced performance.
  * Nanotechnology research for precise metal oxide removal processes.
  * Various industries like automotive and architectural for substrate cleaning and drying.

Patent applications for Applied Materials, Inc. on July 4th, 2024

Methods and Apparatus for Processing a Substrate (18091552)

Main Inventor

Goichi YOSHIDOME

Programmable ESC to Enhance Aluminum Film Morphology (18093141)

Main Inventor

Yaoying ZHONG

PLASMA-ENHANCED MOLYBDENUM DEPOSITION (18093156)

Main Inventor

Tuerxun Ailihumaer

SELECTIVE COBALT DEPOSITION ON COPPER SURFACES (18608005)

Main Inventor

Sang-Ho YU

ELECTROLESS PLATING WITH A FLOATING POTENTIAL (18396003)

Main Inventor

Eric J. Bergman

CAPACITIVE SENSOR FOR MONITORING GAS CONCENTRATION (18604257)

Main Inventor

XIAOPU LI

XRAY DIFFRACTION ANGLE VERIFICATION IN AN ION IMPLANTER (18387987)

Main Inventor

Stephen Krause

XRAY DIFFRACTION ANGLE VERIFICATION IN AN ION IMPLANTER (18091041)

Main Inventor

Stephen Krause

ELECTROSTATIC CHUCK WITH MULTIPLE RADIO FREQUENCY MESHES TO CONTROL PLASMA UNIFORMITY (18600219)

Main Inventor

Edward P. HAMMOND, IV

CYLINDRICAL CAVITY WITH IMPEDANCE SHIFTING BY IRISES IN A POWER-SUPPLYING WAVEGUIDE (18605539)

Main Inventor

Satoru Kobayashi

Programmable Electrostatic Chuck to Enhance Aluminum Film Morphology (18093138)

Main Inventor

Yaoying ZHONG

METHODS TO IMPROVE PRODUCTIVITY OF ADVANCED CVD W GAPFILL PROCESS (18558388)

Main Inventor

Mingrui ZHAO

EFFICIENT AUTOCATALYTIC METALLIZATION OF POLYMERIC SURFACES (18089632)

Main Inventor

Tapash CHAKRABORTY

INTEGRATED CLEAN AND DRY MODULE FOR CLEANING A SUBSTRATE (18101555)

Main Inventor

Jason A. RYE

SELECTIVE METAL SELECTIVITY IMPROVEMENT WITH RF PULSING (18149829)

Main Inventor

Yi Xu

DIPOLE FORMATION PROCESSES (18108719)

Main Inventor

Tianyi Huang

Method and Apparatus for Substrate Temperature Control (18093139)

Main Inventor

Yaoying ZHONG