Applied Materials, Inc. (20240408712). CERAMIC COOLING BASE
Contents
CERAMIC COOLING BASE
Organization Name
Inventor(s)
Andreas Schmid of Santa Clara CA (US)
Stephen Prouty of Santa Clara CA (US)
Alvaro Garcia De Gorordo of Santa Clara CA (US)
Andrew Antoine Noujaim of Santa Clara CA (US)
CERAMIC COOLING BASE
This abstract first appeared for US patent application 20240408712 titled 'CERAMIC COOLING BASE
Original Abstract Submitted
substrate supports and related components including additive manufacturing processes are disclosed. one substrate support assembly includes an electrostatic chuck; and a cooling base having a first surface that is bonded to a first surface of the electrostatic chuck with a metallic bonding material, the cooling base comprising: a ceramic body having a coefficient of thermal expansion substantially the same as the electrostatic chuck; one or more cooling channels formed within the ceramic body; and one or more conductive zones extending through the ceramic body from the first surface to a second surface on an opposite side of the cooling base.
