Applied Materials, Inc. (20240339301). CCP GAS DELIVERY NOZZLE simplified abstract
Contents
CCP GAS DELIVERY NOZZLE
Organization Name
Inventor(s)
Yogananda Sarode Vishwanath of Bangalore (IN)
Andrew Nguyen of San Jose CA (US)
Tom K. Cho of Los Altos Hills CA (US)
CCP GAS DELIVERY NOZZLE - A simplified explanation of the abstract
This abstract first appeared for US patent application 20240339301 titled 'CCP GAS DELIVERY NOZZLE
The patent application discusses structures, methods, and systems for additive manufacturing of components of a source and gas delivery nozzle assembly. One example structure is a unitary gas distribution nozzle assembly made of a single material, with an upper electrode portion, a lower electrode portion, multiple joining structures, and gas zone divider walls.
- The unitary gas distribution nozzle assembly includes an upper electrode portion and a lower electrode portion joined by multiple joining structures.
- One or more gas zone divider walls are positioned between the upper electrode portion and the lower electrode portion.
- The multiple joining structures transfer radio-frequency (RF) energy and thermal energy between the upper and lower electrode portions.
- The gas zone divider walls separate a region between the upper and lower electrode portions into two or more plenum chambers.
Potential Applications: - Additive manufacturing processes - Gas delivery systems - Semiconductor manufacturing
Problems Solved: - Efficient gas distribution in nozzle assemblies - Improved energy transfer between electrode portions
Benefits: - Enhanced manufacturing processes - Increased efficiency in gas delivery systems
Commercial Applications: Gas delivery systems for semiconductor manufacturing industries
Questions about the Technology: 1. How does the unitary gas distribution nozzle assembly improve additive manufacturing processes? 2. What are the advantages of using multiple joining structures in the gas delivery system?
Frequently Updated Research: New developments in additive manufacturing techniques for gas delivery systems.
Original Abstract Submitted
example structures, methods, and systems for additive manufacturing of components of source and gas delivery nozzle assembly are disclosed. one example structure includes a unitary gas distribution nozzle assembly that includes an upper electrode portion and a lower electrode portion joined by multiple joining structures, and one or more gas zone divider walls positioned between the upper electrode portion and the lower electrode portion. the unitary gas distribution nozzle assembly is of a single material. each of the multiple joining structures is positioned between the upper electrode portion and the lower electrode portion. each of the multiple joining structures is configured to transfer radio-frequency (rf) energy and thermal energy between the upper electrode portion and the lower electrode portion. the one or more gas zone divider walls are configured to separate a region between the upper electrode portion and the lower electrode portion into two or more plenum chambers.
