ASM IP Holding B.V. patent applications published on July 4th, 2024

Summary of the patent applications from ASM IP Holding B.V. on July 4th, 2024

1. **Summary**: The recent patents filed by ASM IP Holding B.V. focus on innovative technologies in semiconductor manufacturing. These patents cover methods for creating structures with silicon-filled recesses, ceramic shaft members for semiconductor processing systems, wafer processing apparatus with multiple chambers and robots, and selective passivation layers for thin film deposition processes.

2. **Key Points of Patents**:

  * Methods for forming structures with silicon-filled recesses on a substrate.
  * Ceramic shaft member design with specific segments for driving, keying, and support.
  * Wafer processing apparatus with multiple chambers and robots for efficient handling.
  * Techniques for creating selective passivation layers on dielectric surfaces using chalcogenide layers.

3. **Notable Applications**:

  * Semiconductor manufacturing for advanced electronic devices.
  * Industrial machinery and automotive components for enhanced performance.
  * Research institutions focusing on nanotechnology advancements.
  * Improved efficiency, durability, and reliability in various applications.

Patent applications for ASM IP Holding B.V. on July 4th, 2024

METHODS FOR SELECTIVELY FORMING AND UTILIZING A PASSIVATION LAYER ON A SUBSTRATE AND RELATED STRUCTURES INCLUDING A PASSIVATION LAYER (18397722)

Main Inventor

Anirudhan Chandrasekaran

METHODS AND ASSEMBLIES FOR SELECTIVELY DEPOSITING MOLYBDENUM (18396835)

Main Inventor

Chiyu Zhu

METHOD OF FORMING MOLYBDENUM SILICIDE (18396829)

Main Inventor

Jiyeon Kim

REMOTE SOLID REFILL CHAMBER (18395801)

Main Inventor

Eric James Shero

RUNOUT AND WOBBLE MEASUREMENT FIXTURES (18609379)

Main Inventor

Aniket Nitin Patil

METHODS AND APPARATUS FOR AN ACCUMULATOR (18395822)

Main Inventor

Madhan Kumar Arulanandam

PROCESS CHAMBER VOLUME ADJUSTMENT (18395006)

Main Inventor

Christopher Falcone

THERMAL MONITOR FOR HIGH PRESSURE PROCESSING (18397635)

Main Inventor

Sandeep Ghosh

METHODS AND APPARATUSES FOR CARBON DEPOSITION (18395861)

Main Inventor

Varun Sharma

PARTIAL BREAKDOWN OF PRECURSORS FOR ENHANCED ALD FILM GROWTH (18395907)

Main Inventor

Tommi Tynell

METHODS FOR SELECTIVELY FORMING A DIELECTRIC LAYER ON A METALLIC SURFACE RELATIVE TO A DIELECTRIC SURFACE (18396357)

Main Inventor

Viraj Madhiwala

METHOD AND SYSTEM FOR DEPOSITING BORON CARBON NITRIDE (18396857)

Main Inventor

Antti Niskanen

METHOD, SYSTEM AND APPARATUS FOR FORMING EPITAXIAL TEMPLATE LAYER (18398995)

Main Inventor

Gregory Deye

METHODS FOR SELECTIVELY FORMING A PASSIVATION LAYER ON A DIELECTRIC SURFACE RELATIVE TO A METALLIC SURFACE, METHODS FOR UTILIZING A PASSIVATION LAYER, AND RELATED STRUCTURES INCLUDING A PASSIVATION LAYER (18398598)

Main Inventor

Daniele Chiappe

SEMICONDUCTOR PROCESSING APPARATUS WITH ENHANCED CHAMBER USABILITY AND THE METHOD THEREOF (18397549)

Main Inventor

Yoshiyuki Umeoka

SHAFT MEMBERS, PROCESS KITS AND SEMICONDUCTOR PROCESSING SYSTEMS HAVING SHAFT MEMBERS, AND METHODS OF MAKING SEMICONDUCTOR PROCESSING SYSTEMS (18397372)

Main Inventor

Aniket Chitale

METHODS FOR FORMING GAP-FILLING MATERIALS AND RELATED APPARATUS AND STRUCTURES (18398796)

Main Inventor

Timothee Blanquart